A chip-scale oscillation-mode optomechanical inertial sensor near the thermodynamical limits

High-precision inertial sensing and gravity sensing are key in navigation, oil exploration, and earthquake prediction. In contrast to prior accelerometers using piezoelectric or electronic capacitance readout techniques, optical readout provides narrow-linewidth high-sensitivity laser detection along with low-noise resonant optomechanical transduction near the thermodynamical limits. Here an optomechanical inertial sensor with 8.2micro-g/Hz^1/2 velocity random walk (VRW) at acquisition rate of 100 Hz and 50.9 micro-g bias instability is demonstrated, suitable for consumer and industrial grade applications, e.g., inertial navigation, inclination sensing, platform stabilization, and/or wearable device motion detection. Driven into optomechanical sustained-oscillation, the slot photonic crystal cavity provides radio-frequency readout of the optically-driven transduction with enhanced 625 microg/Hz sensitivity. Measuring the optomechanically-stiffened oscillation shift, instead of the optical transmission shift, provides a 220x VRW enhancement over pre-oscillation mode detection due to the strong optomechanical transduction. Supported by theory, this inertial sensor operates 2.56x above the thermodynamical limit at small integration times, with 43-dB dynamic range, in a solid-state room-temperature readout architecture.