High-quality, large-grain MoS2 films grown on 100 mm sapphire substrates using a novel molybdenum precursor

Two-dimensional MoS2 is a crystalline semiconductor with high potential for numerous technologies. Research in recent years has sought to exploit the direct band gap and high carrier mobility properties of monolayer MoS2 for functional applications. To date, the production of MoS2 has remained at the research level and samples are usually synthesized in small quantities using small yield, expensive techniques. In order to realize scalable MoS2-based technology, large-area, high-quality and affordable MoS2 wafers must become available. Here we report on MoS2 films grown on 100 mm sapphire wafers by a chemical vapor deposition process utilizing hydrogen sulfide and molybdenum precursor mixtures consisting of Na2MoO4 and NaCl. The grains of these films are faceted, large-area, on the order of 1-75 microns in length on edge. Growth conditions are identified that yield monolayer MoS2 films. Raman spectroscopy shows an E2g and A1g peak separation of 17.9-19.1 cm-1. Photoluminescence spectroscopy shows that annealing the films post-growth suppresses trion emission. X-ray photoelectron spectroscopy of the annealed films shows an in increase in the S:Mo concentration ratio from 1.90:1.00 to 2.09:1.00.