Experimental demonstrations of high-Q superconducting coplanar waveguide resonators

We designed and successfully fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a Niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is fabricated as a meandered quarter-wavelength transmission line (one end shorts to the ground and another end is capacitively coupled to a through feedline). With a vector network analyzer we measured the transmissions of the applied microwave through the resonators at ultra-low temperature (e.g., at 20 mK), and found that their loaded quality factors are significantly high, i.e., up to 10^6. With the temperature increases slowly from the base temperature (i.e., 20 mK), we observed the resonance frequencies of the resonators are blue shifted and the quality factors are lowered slightly. In principle, this type of CPW-device can integrate a series of resonators with a common feedline, making it a promising candidate of either the data bus for coupling the distant solid-state qubits or the sensitive detector of single photons.