Performance of Geant4 in simulating semiconductor particle detector response in the energy range below 1 MeV

Geant4 simulations play a crucial role in the analysis and interpretation of experiments providing low energy precision tests of the Standard Model. This paper focuses on the accuracy of the description of the electron processes in the energy range between 100 and 1000 keV. The effect of the different simulation parameters and multiple scattering models on the backscattering coefficients is investigated. Simulations of the response of HPGe and passivated implanted planar Si detectors to \beta{} particles are compared to experimental results. An overall good agreement is found between Geant4 simulations and experimental data.