Pith. sign in

REVIEW

Fabrication of Ultrathin Single-Crystal Diamond Membranes

Not yet reviewed by Pith; the record is open.

Re-run · record.json Download PDF Read on arXiv ↗

This paper has not been read by Pith yet. Machine review is queued; the pith claim, tier, and objections will appear here once it completes.

SPECIMEN: schema-true, not a live event

T0 review · schema-true

One-sentence machine reading of the paper's core claim.

pith:XXXXXXXX · record.json · timestamp

arxiv 1608.08914 v1 pith:OALCKLKZ submitted 2016-08-31 cond-mat.mtrl-sci

B. A. Fairchild , P. Olivero , S. Rubanov , A. D. Greentree , F. Waldermann , R. A. Taylor , I. Walmsley , J. M. Smith
show 4 more authors
S. Huntington B. C. Gibson D. N. Jamieson S. Prawer
This is my paper
classification cond-mat.mtrl-sci
keywords diamondsingle-crystalfabricationlayersmembranesprocessachievedannealing
verification ladder T0 review T1 audit T2 compute T3 formal
0 comments
read the original abstract

We demonstrate the fabrication of sub-micron layers of single-crystal diamond suitable for subsequent processing as demonstrated by this test ring structure. This method is a significant enabling technology for nanomechanical and photonic structures incorporating colour-centres. The process uses a novel double implant process, annealing and chemical etching to produce membranes of diamond from single-crystal starting material, the thinnest layers achieved to date are 210 nm thick.

Discussion (0). Sign in to comment.

Pith tools