Bolometric arrays and infrared sensitivity of VO2 films with varying stoichiometry

Here we propose a linear microbolometric array based on VOx thin films. The linear microbolometric array is fabricated by using micromachining technology, and its thermo-sensitive VOx thin film has excellent infrared response spectrum and TCR characteristics. Nano-scale VOx thin films deposited on SiO2/Si substrates were obtained by e-beam vapor deposition. The VOx films were then annealed at temperatures between 300 to 500 C with various deposition duration time. The crystal structures and microstructures were examined by XRD, SEM and ESCA. These films showed a predominant phase of rhombohedral VO2 and the crystallinity of the VO2 increased as the annealing temperature increased. Integrated with CMOS circuit, an experimentally prototypical monolithic linear microbolometric array is designed and fabricated. The testing results of the experimental linear array show that the responsivity of linear array can approach 18KV/W and is potential for infrared image systems.