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Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils

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arxiv 0905.1712 v2 pith:SIRUS5VV submitted 2009-05-11 cond-mat.mtrl-sci

classification cond-mat.mtrl-sci
keywords graphenecopperfilmssubstratesbecauselarge-areasmallacross
verification ladder T0 review T1 audit T2 compute T3 formal
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Graphene has been attracting great interest because of its distinctive band structure and physical properties. Today, graphene is limited to small sizes because it is produced mostly by exfoliating graphite. We grew large-area graphene films of the order of centimeters on copper substrates by chemical vapor deposition using methane. The films are predominantly single layer graphene with a small percentage (less than 5%) of the area having few layers, and are continuous across copper surface steps and grain boundaries. The low solubility of carbon in copper appears to help make this growth process self-limiting. We also developed graphene film transfer processes to arbitrary substrates, and dual-gated field-effect transistors fabricated on Si/SiO2 substrates showed electron mobilities as high as 4050 cm2V-1s-1 at room temperature.

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