Arrays of Nano-Electromechanical Biosensors Functionalized by Microcontact Printing

The biofunctionalization of nanoelectromechanical structures is critical for the development of new classes of biosensors displaying improved performances and higher-level of integration. We propose a modified microcontact printing method for the functionalization and passivation of large arrays of nanocantilevers in a single, self-aligned step. Using fluorescence microscopy and resonant frequency measurements, we demonstrate (1) the bioactivity and the anti-fouling property of deposited antibodies and BSA molecules and (2) the preservation of the nanostructures' mechanical integrity.