Microstructural and morphological properties of homoepitaxial (001)ZnTe layers investigated by x-ray diffuse scattering

The microstructural and morphological properties of homoepitaxial (001)ZnTe layers are investigated by x-ray diffuse scattering. High resolution reciprocal space maps recorded close to the ZnTe (004) Bragg peak show different diffuse scattering features. One kind of cross-shaped diffuse scattering streaks along <111> directions can be attributed to stacking faults within the epilayers. Another kind of cross-shaped streaks inclined at an angle of about 80deg with respect to the <110> in-plane direction arises from the morphology of the epilayers. (abridged version)