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arxiv: gr-qc/0504134 · v2 · submitted 2005-04-27 · 🌀 gr-qc

Mechanical Dissipation in Silicon Flexures

classification 🌀 gr-qc
keywords dissipationsiliconmechanicalapproachingbeencantileversdetectorsdown
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The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92um thick <110> single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to phi = 4.4E-7.

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