Alpha-Ta resonators on 300 mm high-resistivity Si wafers reach median internal Q factors exceeding 40 million with substrate loss tangent below 10^{-8}, using industrial processing.
Millisecond lifetimes and coherence times in 2D transmon qubits
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Tantalum damascene resonators on 300 mm wafers show modest loss reduction by replacing sidewall oxides with metal-substrate interfaces via buried oxide simulation.
XPS evaluation of 17 capping layers identifies resilient options that limit niobium oxidation during standard fabrication and improve microwave resonator performance.
A review summarizing superconducting qubit types, DiVincenzo criteria implementations, coherence limits from defects, and large-scale integration strategies for quantum computing.
citing papers explorer
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Ultra-high Q-factor superconducting tantalum resonators on 300 mm Si wafers
Alpha-Ta resonators on 300 mm high-resistivity Si wafers reach median internal Q factors exceeding 40 million with substrate loss tangent below 10^{-8}, using industrial processing.
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Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes
Tantalum damascene resonators on 300 mm wafers show modest loss reduction by replacing sidewall oxides with metal-substrate interfaces via buried oxide simulation.
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Fabrication effects on Niobium oxidation and surface contamination in Niobium-metal bilayers using X-ray photoelectron spectroscopy
XPS evaluation of 17 capping layers identifies resilient options that limit niobium oxidation during standard fabrication and improve microwave resonator performance.