Combinatorial HiPIMS deposition and analysis of 850 AlScBN films shows Sc+B co-alloying lowers coercive field from 7 MV/cm to 3 MV/cm at 130-150 μC/cm² polarization, reduces required Sc content, and improves cycling endurance via lower defect density.
Low temperature deposition of functional thin films on insulating substrates enabled by selective ion acceleration using synchronized floating potential HiPIMS,
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Boron Co-Alloying in AlScN Wurtzite Ferroelectrics: Insights from an 850-Sample Combinatorial Study
Combinatorial HiPIMS deposition and analysis of 850 AlScBN films shows Sc+B co-alloying lowers coercive field from 7 MV/cm to 3 MV/cm at 130-150 μC/cm² polarization, reduces required Sc content, and improves cycling endurance via lower defect density.