Nonlinear measurements at 22 GHz show LiNbO3 filters on sapphire substrates achieve higher IIP3 and better thermal stability than on silicon.
3 8-GHz acoustic filter in periodically poled piezoelectric film lithium niobate with 1.52 - L an F
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Gradient residual stress in transferred thin-film lithium niobate varies with orientation and thickness and can be partially compensated by a periodically poled piezoelectric bilayer.
Fabricated three- and eight-element ladder filters using A1 XBARs in 128° Y-cut TFLN achieve 1.79 dB IL with 8.58% FBW at 20.5 GHz and 3.80 dB IL with 6.12% FBW at 22 GHz, with >14.9 dB OoB rejection in compact footprints.
citing papers explorer
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Nonlinear Characterization of Thin-Film LiNbO3 Acoustic Filters
Nonlinear measurements at 22 GHz show LiNbO3 filters on sapphire substrates achieve higher IIP3 and better thermal stability than on silicon.
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Gradient Residual Stress in Transferred Thin-Film Lithium Niobate and Its Compenstation Using Periodically Poled Piezoelectric Bilayers
Gradient residual stress in transferred thin-film lithium niobate varies with orientation and thickness and can be partially compensated by a periodically poled piezoelectric bilayer.
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Practical Demonstrations of FR3-Band Thin-Film Lithium Niobate Acoustic Filter Design
Fabricated three- and eight-element ladder filters using A1 XBARs in 128° Y-cut TFLN achieve 1.79 dB IL with 8.58% FBW at 20.5 GHz and 3.80 dB IL with 6.12% FBW at 22 GHz, with >14.9 dB OoB rejection in compact footprints.