A photolithography and argon-etching sequence produces Al/AlOx/Al Josephson junctions with tunable resistance, few grain boundaries, and SQUIDs that show low chip-to-chip variation and stable performance after repeated cooling to 10 mK, demonstrated in a 40 dB parametric amplifier.
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A simple method to fabricate Josephson junctions
A photolithography and argon-etching sequence produces Al/AlOx/Al Josephson junctions with tunable resistance, few grain boundaries, and SQUIDs that show low chip-to-chip variation and stable performance after repeated cooling to 10 mK, demonstrated in a 40 dB parametric amplifier.