Nonlinear measurements at 22 GHz show LiNbO3 filters on sapphire substrates achieve higher IIP3 and better thermal stability than on silicon.
Thin-film lithium niobate acoustic filter at 23.5 GHz with 38 L an 8 F
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Demonstrates sub-wavelength through-holes in LiNbO3 Lamb-wave resonators to reduce suspension area and standardize etching while preserving frequency, coupling, and Q factor.
Fabricated three- and eight-element ladder filters using A1 XBARs in 128° Y-cut TFLN achieve 1.79 dB IL with 8.58% FBW at 20.5 GHz and 3.80 dB IL with 6.12% FBW at 22 GHz, with >14.9 dB OoB rejection in compact footprints.
citing papers explorer
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Nonlinear Characterization of Thin-Film LiNbO3 Acoustic Filters
Nonlinear measurements at 22 GHz show LiNbO3 filters on sapphire substrates achieve higher IIP3 and better thermal stability than on silicon.
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K-band LiNbO3 A3 Lamb-wave Resonators with Sub-wavelength Through-holes
Demonstrates sub-wavelength through-holes in LiNbO3 Lamb-wave resonators to reduce suspension area and standardize etching while preserving frequency, coupling, and Q factor.
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Practical Demonstrations of FR3-Band Thin-Film Lithium Niobate Acoustic Filter Design
Fabricated three- and eight-element ladder filters using A1 XBARs in 128° Y-cut TFLN achieve 1.79 dB IL with 8.58% FBW at 20.5 GHz and 3.80 dB IL with 6.12% FBW at 22 GHz, with >14.9 dB OoB rejection in compact footprints.