Combinatorial HiPIMS deposition and analysis of 850 AlScBN films shows Sc+B co-alloying lowers coercive field from 7 MV/cm to 3 MV/cm at 130-150 μC/cm² polarization, reduces required Sc content, and improves cycling endurance via lower defect density.
From Fully Strained to Relaxed: Epitaxial Ferroelectric Al1- F. Messi et al., Empa, 2026 19 xScxN for III-N Technology,
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Boron Co-Alloying in AlScN Wurtzite Ferroelectrics: Insights from an 850-Sample Combinatorial Study
Combinatorial HiPIMS deposition and analysis of 850 AlScBN films shows Sc+B co-alloying lowers coercive field from 7 MV/cm to 3 MV/cm at 130-150 μC/cm² polarization, reduces required Sc content, and improves cycling endurance via lower defect density.