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Quantum limit of quality factor in silicon micro and nano mechanical resonators

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Correction Crossref 1 open · 1 total · 0 disputed
DOI
10.1038/srep03244
Notice DOI
10.1038/srep04331
Event date
2014-03-10
Machine twin
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01One-hop citing occurrences

Correction Open
Surface-mediated frequency aging beyond quality-factor saturation in an AlScN-on-silicon resonator

ref [16] · 2608.28959 · notice #10929 · dispute

Raw extraction · citation context

Adibi, "High -Q micromechanical resonators in a two - dimensional phononic crystal slab", Appl. Phys. Lett. 94, 051906 (2009). doi: https://doi.org/10.1063/1.3078284 16. S. Ghaffari, S. A. Chandorkar, S. Wang, E. J. Ng, C. H. Ahn, V. Hong, Y. Yang, and T. W. Kenny, "Quantum limit of quality factor in silicon micro and nano mechanical resonators", Sci. Rep. 3, 3244 (2013). doi: https://doi.org/10.1038/srep03244 -19- 17. M. Akiyama, T. Kamohara, K. Kano, A. Teshigahara, Y. Takeuchi, and N. Kawahara, "Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering", Adv. Mater. 21, 593-596 (2009). doi: https://doi.org/10.1002/adma.200802611 18. M. Ghatge, G. Walters, T. Nishida, and R. Tabrizian, "An ultrathin integrated nanoelectromechanical transducer

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