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Surface-mediated frequency aging beyond quality-factor saturation in an AlScN-on-silicon resonator
ref [16] · 2608.28959 · notice #10929 · dispute
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Adibi, "High -Q micromechanical resonators in a two - dimensional phononic crystal slab", Appl. Phys. Lett. 94, 051906 (2009). doi: https://doi.org/10.1063/1.3078284 16. S. Ghaffari, S. A. Chandorkar, S. Wang, E. J. Ng, C. H. Ahn, V. Hong, Y. Yang, and T. W. Kenny, "Quantum limit of quality factor in silicon micro and nano mechanical resonators", Sci. Rep. 3, 3244 (2013). doi: https://doi.org/10.1038/srep03244 -19- 17. M. Akiyama, T. Kamohara, K. Kano, A. Teshigahara, Y. Takeuchi, and N. Kawahara, "Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering", Adv. Mater. 21, 593-596 (2009). doi: https://doi.org/10.1002/adma.200802611 18. M. Ghatge, G. Walters, T. Nishida, and R. Tabrizian, "An ultrathin integrated nanoelectromechanical transducer