Nanofabrication of Plasmonic Circuits Containing Single Photon Sources

Nanofabrication of photonic components based on dielectric-loaded surface plasmon-polariton waveguides (DLSPPWs) excited by single nitrogen vacancy (NV) centers in nanodiamonds is demonstrated. DLSPPW circuits are built around NV containing nanodiamonds, which are certified to be single-photon emitters, using electron-beam lithography of hydrogen silsesquioxane (HSQ) resist on silver-coated silicon substrates. A propagation length of ~20 {\mu}m for the NV single-photon emission is measured with DLSPPWs. A 5-fold enhancement in the total decay rate and up to 63% coupling efficiency to the DLSPPW mode is achieved, indicating significant mode confinement. Finally, we demonstrate routing of single plasmons with DLSPPW-based directional cou-plers, revealing the potential of our approach for on-chip realization of quantum-optical networks.