Critical-point model dielectric function analysis of WO₃ thin films deposited by atomic layer deposition techniques

WO3 thin films were grown by atomic layer deposition and spectroscopic ellipsometry data gathered in the photon energy range of 0.72-8.5 eV and from multiple samples was utilized to determine the frequency dependent complex-valued isotropic dielectric function for WO3. We employ a critical-point model dielectric function analysis and determine a parameterized set of oscillators and compare the observed critical-point contributions with the vertical transition energy distribution found within the band structure of WO3 calculated by density functional theory. We investigate surface roughness with atomic force microscopy and compare to ellipsometric determined effective roughness layer thickness.