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Aluminum nitride waveguide beam splitters for integrated quantum photonic circuits

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arxiv 2208.01377 v1 pith:XDIJJPED submitted 2022-08-02 physics.optics quant-ph

Aluminum nitride waveguide beam splitters for integrated quantum photonic circuits

classification physics.optics quant-ph
keywords beamquantumsplitterswaveguidealuminumcircuitscouplersdirectional
verification ladder T0 review T1 audit T2 compute T3 formal T4 reserved
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We demonstrate integrated photonic circuits for quantum devices using sputtered polycrystalline aluminum nitride (AlN) on insulator. The on-chip AlN waveguide directional couplers, which are one of the most important components in quantum photonics, are fabricated and show the output power splitting ratios from 50:50 to 99:1. The polarization beam splitters with an extinction ratio of more than 10 dB are also realized from the AlN directional couplers. Using the fabricated AlN waveguide beam splitters, we observe the Hong-Ou-Mandel interference with a visibility of 91.7 +(-) 5.66 %.

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