X-ray scattering investigation of hydride surface segregation in epitaxial Nb films

Hydride precipitation in niobium-based, superconducting circuits is a damaging side-effect of hydrofluoric acid treatments used to clean and thin the Nb surface oxides and Si oxides. The precipitate microstructure is difficult to probe because of the high hydrogen mobility in the niobium matrix. In particular, destructive techniques used to prepare samples for elemental depth profiling can change the hydride structure. Here, we use X-ray surface scattering to non-destructively probe the depth distribution of precipitates in hydrided, epitaxial, niobium thin films. We find that the niobium hydride is confined within the top ten nm of the surface.