In-situ total scattering investigation of crystalline ordering in amorphous ion-beam sputtered thin films for interferometric gravitational wave detectors

Amorphous tantala is an important optical material used in a number of high-precision optical applications, including gravitational wave interferometry. In this paper, we study in-situ the structural changes that occur in amorphous ion-beam sputtered coatings during an annealing treatment by means of a synchrotron radiation scattering experiment. The scattering signal is measured as a function of time on a large range of the Q-space. X-Ray diffraction and Rietveld analysis are used to study crystallization during the annealing treatment, whereas pair distribution function analysis allows to inspect the structural changes occurring during the amorphous to crystalline transition. Our findings indicate that several structural rearrangements occur in parallel, namely a first quick establishment of a backbone structure in the cationic substructure appearing on a rather extended range (up to 100 Angstrom), followed by a progressive rearrangement of the oxygen atoms environment which gradually increases the crystallinity of the structure.