A Coupled Equations Model for Epitaxial Growth on Textured Surfaces

2); (2) Also Department of Electrical; (3) School of Chemical; (4) Optical Communication Products Inc.; A. Ballestad (1); Astronomy; B. J. Ruck (3); Canada; CO; Computer Engineering

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A Coupled Equations Model for Epitaxial Growth on Textured Surfaces

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arxiv cond-mat/0404341 v1 submitted 2004-04-14 cond-mat.mtrl-sci cond-mat.stat-mech

A. Ballestad (1) , T. Tiedje (1 , 2) , J. H. Schmid (1) , B. J. Ruck (3) , M. Adamcyk (4) ((1) Department of Physics , Astronomy , University of British Columbia

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Vancouver Canada (2) Also Department of Electrical Computer Engineering (3) School of Chemical Physical Sciences Victoria University of Wellington New Zealand (4) Optical Communication Products Inc. CO USA)

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classification cond-mat.mtrl-scicond-mat.stat-mech

keywords modelsurfacecontinuumepitaxialgrowthscaleadatomadatoms

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We have developed a continuum model that explains the complex surface shapes observed in epitaxial regrowth on micron scale gratings. This model describes the dependence of the surface morphology on film thickness and growth temperature in terms of a few simple atomic scale processes including adatom diffusion, step-edge attachment and detachment, and a net downhill migration of surface adatoms. The continuum model reduces to the linear part of the Kardar-Parisi-Zhang equation with a flux dependent smoothing coefficient in the long wavelength limit.

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