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arxiv: cond-mat/0703208 · v1 · submitted 2007-03-08 · ❄️ cond-mat.mes-hall · cond-mat.mtrl-sci

A Graphene Field-Effect Device

classification ❄️ cond-mat.mes-hall cond-mat.mtrl-sci
keywords graphenedevicetop-gatedappliedcarriercmos-compatiblecomparedconventional
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In this letter, a top-gated field effect device (FED) manufactured from monolayer graphene is investigated. Except for graphene deposition, a conventional top-down CMOS-compatible process flow is applied. Carrier mobilities in graphene pseudo-MOS structures are compared to those obtained from top-gated Graphene-FEDs. The extracted values exceed the universal mobility of silicon and silicon-on-insulator MOSFETs.

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