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Fabrication of submicron La$_{2-x}$Sr$_{x}$CuO$_{4}$ intrinsic Josephson junction stacks

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arxiv 1108.3469 v1 pith:YVFBC4G6 submitted 2011-08-17 cond-mat.supr-con quant-ph

classification cond-mat.supr-conquant-ph
keywords intrinsicstacksetchingfabricationjosephsonjunctionlscomethod
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abstract

Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La$_{2-x}$Sr$_{x}$CuO$_{4}$ (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multi-branches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this method.

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