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Simple coplanar waveguide resonator mask targeting metal-substrate interface
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This white paper presents a single-layer mask, found at https://github.com/Boulder-Cryogenic-Quantum-Testbed/simple-resonator-mask. It is designed for fabrication of superconducting microwave resonators towards 1:1 comparisons of dielectric losses from the metal-substrate interface. Finite-element electromagnetic simulations are used to determine participation ratios of the four major regions of the on-chip devices, as well as to confirm lack of crosstalk between neighboring devices and demonstrate coupling tunability over three orders of magnitude. This mask is intended as an open-source community resource for facilitating precise and accurate comparisons of materials in the single-photon, millikelvin regime.
Forward citations
Cited by 3 Pith papers
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Interface-sensitive microwave loss in superconducting tantalum films sputtered on c-plane sapphire
Epitaxial alpha-tantalum grown directly on c-plane sapphire shows a large, power-independent microwave loss that disappears when a niobium interlayer or a damaged sapphire surface prevents direct epitaxial Ta/sapphire...
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High-Q superconducting microwave resonators using MBE titanium nitride
MBE TiN on c-plane sapphire achieves a record 18 arcsec rocking-curve width and CPW resonator internal Qi > 1e6 at single-photon powers.
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Loss tangent fluctuations due to two-level systems in superconducting microwave resonators
Low-power internal quality factor fluctuations in superconducting resonators are attributed to time-varying TLS loss tangent, with relative standard deviation of 13%.
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