Low-Temperature Remote Plasma Synthesis of Highly Porous TiO₂ as Electron Transport Layers in Perovskite Solar Cells

Halide perovskite solar cells (PSCs) offer high efficiency and low costs, making them key for future photovoltaics. Optimizing charge transport layers is crucial, with porous TiO$_2$ widely used as electron transport layers (ETL) due to its energy alignment, transparency, and abundance. However, its efficiency relies on crystallinity requiring high-temperature processing (>450$^\circ$C), increasing costs and limiting flexible substrates. Low-temperature wet-chemical methods face scalability issues due to material waste and hazardous solvents. In this context, plasma-based technologies are emerging as a more efficient and sustainable alternative to oxide-based ETLs. This study presents the synthesis of TiO$_2$ layers using an advanced plasma method combining remote plasma-assisted vacuum deposition (RPAVD) and soft plasma etching (SPE) at mild temperatures (<200$^\circ$C), allowing control of microstructure and porosity. The resulting nanocolumnar film, decorated with a highly porous aerogel-like layer, enhances optical and electronic properties. These plasma-synthesized TiO$_2$ layers are antireflective and improve the efficiency in porous n-i-p PSCs, matching the performance of high-temperature reference cells. These PSCs achieve a champion PCE of 14.6%, a high value compared to reference devices synthesized at 450{\deg}C. Impedance spectroscopy confirms high recombination resistance and stable capacitance, linked to improved perovskite crystallinity. Our results highlight the potential of the RPAVD+SPE approach for producing low-temperature efficient ETLs, providing a feasible, industrially scalable, and eco-friendly alternative for manufacturing flexible, high-performance photovoltaic devices.