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arxiv: 2509.17617 · v2 · submitted 2025-09-22 · ❄️ cond-mat.mes-hall

Device-scaling constraints imposed by the van der Waals gap formed in two-dimensional materials

Pith reviewed 2026-05-18 14:51 UTC · model grok-4.3

classification ❄️ cond-mat.mes-hall
keywords two-dimensional materialsvan der Waals gaptransistor scalinggate leakagecontact resistance2D semiconductorsdevice miniaturizationelectrostatic control
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The pith

The van der Waals gap in 2D material devices creates a scaling trade-off that causes many insulators to miss targets and leaves contact resistances too high.

A machine-rendered reading of the paper's core claim, the machinery that carries it, and where it could break.

The paper examines how a van der Waals gap naturally forms at the interfaces between two-dimensional semiconductors and both gate dielectrics and contact metals. This gap acts as a low-dielectric-constant tunneling barrier that cuts down gate leakage but also adds a parasitic series capacitance and raises source and drain contact resistance. The authors calculate the resulting limits on how far transistors can be scaled down while keeping leakage and resistance acceptable. They conclude that many standard insulators do not meet the necessary criteria and that metal contacts to the channel cannot reach the required low resistances. Interfaces without the gap, such as zipper-like bonds, are suggested as a way forward for continued miniaturization.

Core claim

In two-dimensional semiconductors the van der Waals gap that forms at gate-dielectric and metal-contact interfaces functions as a low-dielectric-constant tunneling barrier. This barrier reduces gate leakage yet simultaneously increases contact resistance and introduces parasitic capacitance in series with the gate dielectric, thereby imposing fundamental constraints on electrostatic scaling and contact performance in miniaturized transistors.

What carries the argument

The van der Waals gap modeled as a uniform low-dielectric-constant layer that serves as both a tunneling barrier for leakage and a parasitic capacitance element.

If this is right

  • Many common gate insulators fail to satisfy the combined leakage and capacitance requirements for further scaling.
  • Source and drain contacts to the 2D channel cannot achieve the low resistances needed for high-performance devices.
  • Zipper-like interfaces that eliminate the van der Waals gap through quasi-covalent bonding without dangling bonds enable better scaling.
  • The quantified trade-off shows that leakage suppression comes at the cost of electrostatic and contact limits.

Where Pith is reading between the lines

These are editorial extensions of the paper, not claims the author makes directly.

  • Interface engineering to remove or modify the van der Waals gap could unlock continued scaling in 2D electronics.
  • Similar gap effects may appear in other 2D-material-based devices such as sensors or memory elements.
  • Experimental validation could involve fabricating devices with and without engineered interfaces and measuring actual contact resistances and capacitances against the model predictions.

Load-bearing premise

The van der Waals gap is assumed to form reliably at every relevant interface and to behave as a simple low-dielectric-constant tunneling barrier whose properties can be calculated without extra chemistry or defects.

What would settle it

Fabrication and electrical testing of scaled 2D transistors using different insulators and contact metals to measure whether gate leakage, parasitic capacitance, and contact resistance match the predicted values that cause scaling failure.

read the original abstract

Transistor miniaturization requires controlling gate leakage through ultrathin dielectrics and minimizing source/drain contact resistance. Although two-dimensional (2D) semiconductors offer excellent electrostatic control, their interfaces with gate dielectrics and contact metals often form a van der Waals (vdW) gap that impacts device performance and acts as a tunneling barrier with a low-dielectric constant. While this reduces dielectric leakage, it increases metal-channel contact resistance and introduces a parasitic series capacitance to the gate. We quantified the trade-off between leakage suppression and electrostatic and contact-resistance scaling limits. As a result, many insulators fail to meet scaling targets, and metal-channel contacts fall short of required resistances. Zipper-like interfaces, where quasi-covalent bonding removes the vdW gap without creating dangling bonds, offer a path toward ultrascaled transistor designs.

Editorial analysis

A structured set of objections, weighed in public.

Desk editor's note, referee report, simulated authors' rebuttal, and a circularity audit. Tearing a paper down is the easy half of reading it; the pith above is the substance, this is the friction.

Referee Report

3 major / 2 minor

Summary. The manuscript analyzes how the van der Waals (vdW) gap that forms at interfaces between 2D semiconductors and gate dielectrics or contact metals constrains transistor scaling. It treats the gap as a low-dielectric-constant tunneling barrier that suppresses gate leakage while adding parasitic series capacitance and raising source/drain contact resistance. Quantitative trade-off curves are presented showing that many common insulators fail to meet projected leakage and electrostatic targets and that metal-channel contacts cannot reach the required resistance values. Zipper-like interfaces that eliminate the vdW gap via quasi-covalent bonding are proposed as a route to overcome these limits.

Significance. If the modeling assumptions hold, the work supplies a concrete framework for evaluating dielectric and contact choices in 2D FETs and identifies a clear performance bottleneck that experimental groups would need to address. The suggestion of zipper-like interfaces is constructive and could stimulate targeted interface-engineering studies. The analysis is timely for the 2D-materials device community.

major comments (3)
  1. [§3.1] §3.1 and the leakage model: the vdW gap is treated throughout as a uniform low-k (k≈1.5) tunneling barrier of fixed thickness (≈0.3–0.4 nm) whose properties are independent of the adjacent dielectric or metal. This assumption is load-bearing for the claim that “many insulators fail to meet scaling targets,” yet no material-specific ab initio results or experimental interface data are shown to justify the fixed parameters across the dielectrics examined.
  2. [§4.2] §4.2, contact-resistance scaling: the conclusion that metal-channel contacts fall short of required resistances rests on the same fixed-gap tunneling model. If real interfaces exhibit partial gap closure or chemistry-induced barrier-height changes (as the skeptic note flags), the resistance curves would shift and the quantitative shortfall would need re-evaluation.
  3. [§5] §5, zipper-interface proposal: while conceptually attractive, the manuscript provides no quantitative estimate of the residual barrier height or contact resistance once the vdW gap is removed, leaving the claim that such interfaces “offer a path toward ultrascaled transistor designs” unsupported by numbers.
minor comments (2)
  1. [Figure 2] Figure 2: axis labels and units for the parasitic capacitance contribution are missing; the reader cannot directly compare the plotted values to the ITRS targets cited in the text.
  2. [Notation] Notation: the symbol E_g is used both for the semiconductor band gap and for an effective gap height in the tunneling model; a distinct symbol would improve clarity.

Simulated Author's Rebuttal

3 responses · 0 unresolved

We thank the referee for the constructive and detailed comments, which have helped us clarify the modeling assumptions and improve the presentation of our results. We address each major comment point by point below.

read point-by-point responses
  1. Referee: [§3.1] §3.1 and the leakage model: the vdW gap is treated throughout as a uniform low-k (k≈1.5) tunneling barrier of fixed thickness (≈0.3–0.4 nm) whose properties are independent of the adjacent dielectric or metal. This assumption is load-bearing for the claim that “many insulators fail to meet scaling targets,” yet no material-specific ab initio results or experimental interface data are shown to justify the fixed parameters across the dielectrics examined.

    Authors: The vdW gap parameters are representative averages drawn from multiple experimental reports (AFM, TEM, and capacitance measurements) on 2D interfaces, as cited in Section 2. While we recognize that interface-specific chemistry can introduce variations, the fixed values enable identification of general scaling trends that apply across a range of common dielectrics. In the revised manuscript we have added a dedicated sensitivity paragraph in §3.1 that quantifies how ±0.1 nm or ±0.5 changes in gap thickness and dielectric constant shift the leakage curves, together with additional citations to ab initio interface studies that support the chosen averages. revision: partial

  2. Referee: [§4.2] §4.2, contact-resistance scaling: the conclusion that metal-channel contacts fall short of required resistances rests on the same fixed-gap tunneling model. If real interfaces exhibit partial gap closure or chemistry-induced barrier-height changes (as the skeptic note flags), the resistance curves would shift and the quantitative shortfall would need re-evaluation.

    Authors: We agree that partial gap closure or chemistry-driven barrier modifications can occur in practice. Our analysis deliberately retains the conservative fixed-gap assumption to highlight the intrinsic limit imposed by a persistent vdW gap. The revised §4.2 now includes a short discussion of how such deviations would move the resistance curves and cites recent experimental demonstrations of interface-engineered contacts that achieve lower resistances, thereby framing the quantitative shortfall as a benchmark rather than an absolute prediction. revision: partial

  3. Referee: [§5] §5, zipper-interface proposal: while conceptually attractive, the manuscript provides no quantitative estimate of the residual barrier height or contact resistance once the vdW gap is removed, leaving the claim that such interfaces “offer a path toward ultrascaled transistor designs” unsupported by numbers.

    Authors: The zipper-like interface is offered as a conceptual route whose primary benefit is the elimination of the tunneling barrier and parasitic capacitance. Specific residual barrier heights and contact resistances would require material-pair-specific first-principles calculations that lie outside the scope of the present work, which focuses on quantifying the constraints created by the vdW gap itself. In the revised §5 we have added references to recent experimental reports of quasi-covalent 2D interfaces that show reduced effective barriers and clarified that the proposal is intended to motivate targeted follow-on modeling and device studies rather than to supply ready-to-use numerical targets. revision: partial

Circularity Check

0 steps flagged

No significant circularity in derivation chain

full rationale

The paper models the van der Waals gap as a low-k tunneling barrier at 2D material interfaces and quantifies trade-offs between leakage suppression, electrostatic scaling, and contact resistance under that model. The abstract and described approach state the gap-formation assumption explicitly as an input rather than deriving it from the scaling conclusions. No equations, predictions, or steps reduce the quantified limits to fitted parameters by construction, nor do they rely on self-citation chains or imported uniqueness theorems for the central claims. The results about insulator failures and contact shortfalls follow from applying the stated barrier model to scaling targets, remaining self-contained against external physical benchmarks and without circular equivalence to the inputs.

Axiom & Free-Parameter Ledger

0 free parameters · 1 axioms · 0 invented entities

Based on abstract only; the central claim rests on the domain assumption that vdW gaps form at typical interfaces and dominate tunneling and capacitance behavior.

axioms (1)
  • domain assumption A van der Waals gap forms at interfaces between 2D semiconductors and gate dielectrics or contact metals and functions as a low-dielectric-constant tunneling barrier.
    Stated directly in the abstract as the starting point for the trade-off analysis.

pith-pipeline@v0.9.0 · 5670 in / 1243 out tokens · 41298 ms · 2026-05-18T14:51:37.448172+00:00 · methodology

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Works this paper leans on

72 extracted references · 72 canonical work pages

  1. [1]

    Das,et al., Transistors based on two-dimensional materials for future integrated circuits

    S. Das,et al., Transistors based on two-dimensional materials for future integrated circuits. Nat. Electron.4(11), 786–799 (2021), doi:10.1038/s41928-021-00670-1

  2. [2]

    InternationalRoadmapforDevicesandSystems(IRDS)(2023),https://irds.ieee.org/

  3. [3]

    Y. Y. Illarionov,et al., Insulators for 2D nanoelectronics: the gap to bridge.Nat. Commun. 11(1), 3385 (2020), doi:10.1038/s41467-020-16640-8

  4. [4]

    M. R. Osanloo, M. L. Van de Put, A. Saadat, W. G. Vandenberghe, Identification of two- dimensional layered dielectrics from first principles.Nat. Commun.12(1), 5051 (2021), doi:10.1038/s41467-021-25310-2

  5. [5]

    Li,et al., High-throughput screening and machine learning classification of van der Waals dielectrics for 2D nanoelectronics.Nat

    Y. Li,et al., High-throughput screening and machine learning classification of van der Waals dielectrics for 2D nanoelectronics.Nat. Commun.15(1), 9527 (2024), doi:10.1038/ s41467-024-53864-4

  6. [6]

    Stengel, N

    M. Stengel, N. A. Spaldin, Origin of the dielectric dead layer in nanoscale capacitors.Nature 443(7112), 679–682 (2006), doi:10.1038/nature05148

  7. [7]

    M. V. Fischetti, D. A. Neumayer, E. A. Cartier, Effective electron mobility in Si inversion layers in metal–oxide–semiconductor systems with a high-𝜅insulator: The role of remote phonon scattering.J. Appl. Phys.90(9), 4587–4608 (2001), doi:10.1063/1.1405826

  8. [8]

    K. S. Novoselov, A. Mishchenko, A. Carvalho, A. H. Castro Neto, 2D materials and van der Waals heterostructures.Science353(6298), aac9439 (2016), doi:10.1126/science.aac9439

  9. [9]

    Electron Devices50(4), 1027– 1035 (2003), doi:10.1109/ted.2003.812504

    Y.-C.Yeo,T.-J.King,C.Hu,MOSFETgateleakagemodelingandselectionguideforalternative gate dielectrics based on leakage considerations.IEEE Trans. Electron Devices50(4), 1027– 1035 (2003), doi:10.1109/ted.2003.812504

  10. [10]

    Huang, Jing-Kai and Wan, Yi and Shi, Junjie and Zhang, Ji and Wang, Zeheng and Wang, WenxuanandYang,NiandLiu,YangandLin,Chun-HoandGuan,XinweiandHu,Longand Yang,Zi-LiangandHuang,Bo-ChaoandChiu,Ya-PingandYang,JackandTung,Vincentand 19 Wang, Danyang and Kalantar-Zadeh, Kourosh and Wu, Tom and Zu, Xiaotao and Qiao, Liang andLi,Lain-JongandLi,Sean,High-𝜅perovs...

  11. [11]

    Moazzami Gudarzi, S

    M. Moazzami Gudarzi, S. H. Aboutalebi, Mapping the binding energy of layered crystals to macroscopic observables.Adv. Sci.9(33), 2204001 (2022), doi:10.1002/advs.202204001

  12. [12]

    3(8), 473–478 (2020), doi:10.1038/s41928-020-0444-6

    T.Li,etal.,Anativeoxidehigh-𝜅gatedielectricfortwo-dimensionalelectronics.Nat.Electron. 3(8), 473–478 (2020), doi:10.1038/s41928-020-0444-6

  13. [13]

    ACS Nano19(17), 16903–16912 (2025), doi:10.1021/acsnano.5c02341

    Y.Shen,etal.,MoS 2 transistorswith4nmhBNGateDielectricand0.46Vthresholdvoltage. ACS Nano19(17), 16903–16912 (2025), doi:10.1021/acsnano.5c02341

  14. [14]

    Chen,et al., Probing the electron states and metal-insulator transition mechanisms in molybdenum disulphide vertical heterostructures.Nat

    X. Chen,et al., Probing the electron states and metal-insulator transition mechanisms in molybdenum disulphide vertical heterostructures.Nat. Commun.6(1), 6088 (2015), doi: 10.1038/ncomms7088

  15. [15]

    Giovannetti,et al., Doping graphene with metal contacts.Phys

    G. Giovannetti,et al., Doping graphene with metal contacts.Phys. Rev. Lett.101, 026803 (2008), doi:10.1103/PhysRevLett.101.026803

  16. [16]

    Electron.8(2), 96–98 (2025), doi:10.1038/s41928-024-01335-5

    D.Akinwande,C.Biswas,D.Jena,Thequantumlimitsofcontactresistanceandballistictrans- port in 2D transistors.Nat. Electron.8(2), 96–98 (2025), doi:10.1038/s41928-024-01335-5

  17. [17]

    Electron.4(2), 98–108 (2021), doi: 10.1038/s41928-020-00529-x

    T.Knobloch,etal.,Theperformancelimitsofhexagonalboronnitrideasaninsulatorforscaled CMOS devices based on two-dimensional materials.Nat. Electron.4(2), 98–108 (2021), doi: 10.1038/s41928-020-00529-x

  18. [18]

    Materials and methods are available as supplementary material

  19. [19]

    Zhang,et al., A single-crystalline native dielectric for two-dimensional semiconductors with an equivalent oxide thickness below 0.5nm.Nat

    Y. Zhang,et al., A single-crystalline native dielectric for two-dimensional semiconductors with an equivalent oxide thickness below 0.5nm.Nat. Electron.5(10), 643–649 (2022), doi:10.1038/s41928-022-00824-9

  20. [20]

    A. P. Rooney,et al., Observing Imperfection in Atomic Interfaces for van der Waals Het- erostructures.Nano Letters17(9), 5222–5228 (2017), doi:10.1021/acs.nanolett.7b01248. 20

  21. [21]

    Luo,et al., Molybdenum disulfide transistors with enlarged van der Waals gaps at their dielectric interface via oxygen accumulation.Nat

    P. Luo,et al., Molybdenum disulfide transistors with enlarged van der Waals gaps at their dielectric interface via oxygen accumulation.Nat. Electron.5(12), 849–858 (2022), doi: 10.1038/s41928-022-00877-w

  22. [22]

    Fu,et al., Low-temperature controlled growth of 2D LaOCl with enhanced dielectric prop- erties for advanced electronics.Adv

    Z. Fu,et al., Low-temperature controlled growth of 2D LaOCl with enhanced dielectric prop- erties for advanced electronics.Adv. Funct. Mater.p. 2501136 (2025), doi:10.1002/adfm. 202501136

  23. [23]

    D.Willhelm,etal.,Predictingvanderwaalsheterostructuresbyacombinedmachinelearning and density functional theory approach.ACS Appl. Mater. Interfaces14(22), 25907–25919 (2022), doi:10.1021/acsami.2c04403

  24. [24]

    K.Tang,W.Qi,Y.Wei,G.Ru,W.Liu,High-throughputcalculationofinterlayervanderWaals forces validated with experimental measurements.Research2022(2022), doi:10.34133/2022/ 9765121

  25. [25]

    (38) Chatzigoulas, A.; Karathanou, K.; Dellis, D.; Cournia, Z

    B. Cordero,et al., Covalent radii revisited.Dalton Trans.(21), 2832–2838 (2008), doi: 10.1039/B801115J

  26. [26]

    S. S. Batsanov, Van der Waals radii of elements.Inorg. Mater.37(9), 871–885 (2001), doi: 10.1023/A:1011625728803

  27. [27]

    Y. Kang, D. Jeon, T. Kim, Local mapping of the thickness-dependent dielectric constant of MoS2.J. Phys. Chem. C125(6), 3611–3615 (2021), doi:10.1021/acs.jpcc.0c11198

  28. [28]

    B. L. Evans, P. A. Young, Delocalized excitons in thin anisotropic crystals.Phys. Status Solidi B25(1), 417–425 (1968), doi:10.1002/pssb.19680250139

  29. [29]

    Britnell,et al., Electron tunneling through ultrathin boron nitride crystalline barriers.Nano Lett.12(3), 1707–1710 (2012), doi:10.1021/nl3002205

    L. Britnell,et al., Electron tunneling through ultrathin boron nitride crystalline barriers.Nano Lett.12(3), 1707–1710 (2012), doi:10.1021/nl3002205

  30. [30]

    Y. H. Deng,et al., Improved electrical uniformity and performance via low-cost hybrid wet transfer method for van der Waals source/drain contact formation in MoS2 field-effect tran- sistors.IEEE Trans. Electron Devices71(12), 7943–7947 (2024), doi:10.1109/TED.2024. 3487821. 21

  31. [31]

    Qi,et al., Graphene-enhanced metal transfer printing for strong van der Waals contacts between 3D metals and 2D semiconductors.Adv

    D. Qi,et al., Graphene-enhanced metal transfer printing for strong van der Waals contacts between 3D metals and 2D semiconductors.Adv. Funct. Mater.33(27) (2023), doi:10.1002/ adfm.202301704

  32. [32]

    Kumar,et al., Sub-200Ω·𝜇m alloyed contacts to synthetic monolayer MoS2, in2021 IEEE International Electron Devices Meeting (IEDM)(IEEE) (2021), pp

    A. Kumar,et al., Sub-200Ω·𝜇m alloyed contacts to synthetic monolayer MoS2, in2021 IEEE International Electron Devices Meeting (IEDM)(IEEE) (2021), pp. 7.3.1–7.3.4, doi: 10.1109/IEDM19574.2021.9720609

  33. [33]

    Y.Wang,etal.,VanderWaalscontactsbetweenthree-dimensionalmetalsandtwo-dimensional semiconductors.Nature568(7750), 70–74 (2019), doi:10.1038/s41586-019-1052-3

  34. [34]

    Chou,et al., High on-state current in chemical vapor deposited monolayer MoS2 nFETs withSnohmiccontacts.IEEEElectronDeviceLett.42(2),272–275(2021),doi:10.1109/LED

    A.-S. Chou,et al., High on-state current in chemical vapor deposited monolayer MoS2 nFETs withSnohmiccontacts.IEEEElectronDeviceLett.42(2),272–275(2021),doi:10.1109/LED. 2020.3048371

  35. [35]

    Li,et al., Approaching the quantum limit in two-dimensional semiconductor contacts

    W. Li,et al., Approaching the quantum limit in two-dimensional semiconductor contacts. Nature613(7943), 274–279 (2023), doi:10.1038/s41586-022-05431-4

  36. [36]

    Z. Sun,et al., Low contact resistance on monolayer MoS2 field-effect transistors achieved by CMOS-compatible metal contacts.ACS Nano18(33), 22444–22453 (2024), doi:10.1021/ acsnano.4c07267

  37. [37]

    G.Kresse,J.Hafner,Abinitiomoleculardynamicsforliquidmetals.Phys.Rev.B47,558–561 (1993), doi:10.1103/PhysRevB.47.558

  38. [38]

    G.Kresse,J.Hafner,Abinitiomolecular-dynamicssimulationoftheliquid-metal–amorphous- semiconductor transition in germanium.Phys. Rev. B49(20), 14251–14269 (1994), doi: 10.1103/PhysRevB.49.14251

  39. [39]

    Grimme, J

    S. Grimme, J. Antony, S. Ehrlich, H. Krieg, A consistent and accurateab initioparametrization of density functional dispersion correction (DFT-D) for the 94 elements H-Pu.J. Chem. Phys. 132(15) (2010), doi:10.1063/1.3382344

  40. [40]

    Cherkaoui,et al., Electrical, structural, and chemical properties of HfO2 films formed by electron beam evaporation.J

    K. Cherkaoui,et al., Electrical, structural, and chemical properties of HfO2 films formed by electron beam evaporation.J. Appl. Phys.104(6), 064113 (2008), doi:10.1063/1.2978209. 22

  41. [41]

    M. Lee, Y. Youn, K. Yim, S. Han, High-throughput ab initio calculations on dielec- tric constant and band gap of non-oxide dielectrics.Sci. Rep.8(1), 14794 (2018), doi: 10.1038/s41598-018-33095-6

  42. [42]

    A. Sher, R. Solomon, K. Lee, M. W. Muller, Transport properties of LaF3.Phys. Rev.144(2), 593–604 (1966), doi:10.1103/PhysRev.144.593

  43. [43]

    Li,et al., Ultrathin van der Waals lanthanum oxychloride dielectric for 2D field-effect transistors.Adv

    L. Li,et al., Ultrathin van der Waals lanthanum oxychloride dielectric for 2D field-effect transistors.Adv. Mater.p. 2309296 (2023), doi:10.1002/adma.202309296

  44. [44]

    Electron.4(12), 906–913 (2021), doi:10.1038/s41928-021-00683-w

    K.Liu,etal.,Awafer-scalevanderWaalsdielectricmadefromaninorganicmolecularcrystal film.Nat. Electron.4(12), 906–913 (2021), doi:10.1038/s41928-021-00683-w

  45. [45]

    Wang,et al., High-temperature relaxations in CaF2 single crystals.Mater

    J. Wang,et al., High-temperature relaxations in CaF2 single crystals.Mater. Sci. Eng. B188, 31–34 (2014), doi:10.1016/j.mseb.2014.06.004

  46. [46]

    A.Pierret,etal.,Dielectricpermittivity,conductivityandbreakdownfieldofhexagonalboron nitride.Mater. Res. Express9(6), 065901 (2022), doi:10.1088/2053-1591/ac4fe1

  47. [47]

    Laturia, M

    A. Laturia, M. L. Van de Put, W. G. Vandenberghe, Dielectric properties of hexagonal boron nitrideandtransitionmetaldichalcogenides:frommonolayertobulk.npj2DMater.Appl.2(1) (2018), doi:10.1038/s41699-018-0050-x

  48. [48]

    Geick, C

    R. Geick, C. H. Perry, G. Rupprecht, Normal modes in hexagonal noron nitride.Phys. Rev. 146(2), 543–547 (1966), doi:10.1103/PhysRev.146.543

  49. [49]

    Li,et al., Uniform and ultrathin high-𝜅gate dielectrics for two-dimensional electronic devices.Nat

    W. Li,et al., Uniform and ultrathin high-𝜅gate dielectrics for two-dimensional electronic devices.Nat. Electron.2(12), 563–571 (2019), doi:10.1038/s41928-019-0334-y

  50. [50]

    Y. Li, J. R. Sun, J. L. Zhao, B. G. Shen, Surface electronic inhomogeneity of the (001)- SrTiO3:Nb crystal with a terrace-structured morphology.J. Appl. Phys.114(15), 154303 (2013), doi:10.1063/1.4825047

  51. [51]

    V. E. Henrich, G. Dresselhaus, H. J. Zeiger, Surface defects and the electronic structure of SrTiO3 surfaces.Phys. Rev. B17(12), 4908–4921 (1978), doi:10.1103/PhysRevB.17.4908. 23

  52. [52]

    W.Pong,C.S.Inouye,PhotoemissionstudiesofLaF 3.J.Opt.Soc.Am.68(4),521–523(1978), doi:10.1364/JOSA.68.000521

  53. [53]

    H. Liu, L. Rao, J. Qi, G. Tang, First-principles insights into Bi2XO5 (X=Se,Te) monolayers as high-𝜅gate dielectrics for 2D electronics.Appl. Phys. Lett.126(7) (2025), doi:10.1063/5. 0242581

  54. [54]

    R. T. Poole,et al., Electronegativity as a unifying concept in the determination of fermi energiesandphotoelectricthresholds.Chem.Phys.Lett.36(3),401–403(1975),doi:10.1016/ 0009-2614(75)80267-3

  55. [55]

    Journal of Physics: Condensed Matter36(36), 363501 (2024) https://doi.org/10.1088/1361-648x/ ad399c

    F. Matusalem, M. Marques, L. K. Teles, A. Filippetti, G. Cappellini, Electronic properties of fluoridesbyefficientapproximatedquasiparticleDFT-1/2andPSICmethods:BaF 2 ,CaF 2 and CdF2 astestcases.J.Phys.Condens.Matter30(36),365501(2018),doi:10.1088/1361-648X/ aad654

  56. [56]

    Eng.283, 112106 (2024), doi:10.1016/j.mee.2023.112106

    S.A.Marye,R.R.Kumar,A.Useinov,N.Tumilty,Thermalstability,workfunctionandFermi level analysis of 2D multi-layered hexagonal boron nitride films.Microelectron. Eng.283, 112106 (2024), doi:10.1016/j.mee.2023.112106

  57. [57]

    S. W. Lee, J. H. Han, C. S. Hwang, Electronic conduction mechanism of SrTiO3 thin film grown on Ru electrode by atomic layer deposition.Electrochem Solid-State Lett12(11), G69 (2009), doi:10.1149/1.3212897

  58. [58]

    M.A.Pawlak,etal.,Towards1XDRAM:Improvedleakage0.4nmEOTSTO-basedMIMcap andexplanationofleakagereductionmechanismshowingfurtherpotential,in2011Symposium on VLSI Technology - Digest of Technical Papers(2011)

  59. [59]

    O.Kochan,etal.,EnergystructureandluminescenceofCeF 3crystals.Materials14(15),4243 (2021), doi:10.3390/ma14154243

  60. [60]

    Khakbaz,et al., Two-dimensional Bi2SeO2 and its native insulators for next-generation nanoelectronics.ACS Nano19(10), 9788–9800 (2025), doi:10.1021/acsnano.4c12160

    P. Khakbaz,et al., Two-dimensional Bi2SeO2 and its native insulators for next-generation nanoelectronics.ACS Nano19(10), 9788–9800 (2025), doi:10.1021/acsnano.4c12160. 24

  61. [61]

    B. Y. Zhang,et al., Theoretical and experimental characterizations of hot electron emission of n-Si/CaF2/Au emitter used in hot electron detection experiment.Phys. B Condens. Matter 272(1), 425–427 (1999), doi:10.1016/S0921-4526(99)00388-9

  62. [62]

    M.I.Vexler,etal.,ElectricalcharacterizationandmodelingoftheAu/CaF 2/nSi(111)structures withhigh-qualitytunnel-thinfluoridelayer.J.Appl.Phys.105(8),083716(2009),doi:10.1063/ 1.3110066

  63. [63]

    J. P. Allen, J. J. Carey, A. Walsh, D. O. Scanlon, G. W. Watson, Electronic structures of antimony oxides.J. Phys. Chem. C117(28), 14759–14769 (2013), doi:10.1021/jp4026249

  64. [64]

    Liu,et al., Few-layer𝛼-Sb2O3 molecular crystals as high-𝜅van der Waals dielectrics: electronic decoupling and significant surface ionic behaviors.J

    J.-B. Liu,et al., Few-layer𝛼-Sb2O3 molecular crystals as high-𝜅van der Waals dielectrics: electronic decoupling and significant surface ionic behaviors.J. Mater. Chem. C12(24), 8825–8836 (2024), doi:10.1039/D4TC00753K

  65. [65]

    Gajdoš, K

    M. Gajdoš, K. Hummer, G. Kresse, J. Furthmüller, F. Bechstedt, Linear optical properties in the projector-augmented wave methodology.Phys. Rev. B73(4), 045112 (2006), doi: 10.1103/physrevb.73.045112

  66. [66]

    Giustino, A

    F. Giustino, A. Pasquarello, Theory of atomic-scale dielectric permittivity at insulator inter- faces.Phys. Rev. B71(14), 144104 (2005), doi:10.1103/PhysRevB.71.144104

  67. [67]

    Kumar,et al., Thickness and electric-field-dependent polarizability and dielectric constant in phosphorene.Phys

    P. Kumar,et al., Thickness and electric-field-dependent polarizability and dielectric constant in phosphorene.Phys. Rev. B93(19), 195428 (2016), doi:10.1103/PhysRevB.93.195428

  68. [68]

    M. S. Majdoub, R. Maranganti, P. Sharma, Understanding the origins of the intrinsic dead layer effect in nanocapacitors.Phys. Rev. B79(11), 115412 (2009), doi:10.1103/PhysRevB. 79.115412

  69. [69]

    J.Maserjian,TunnelinginthinMOSstructures.J.Vac.Sci.Technol.11(6),996–1003(1974), doi:10.1116/1.1318719

  70. [70]

    X. Guan, D. Kim, K. C. Saraswat, H.-S. P. Wong, Complex band structures: From parabolic to elliptic approximation.IEEE Electron Device Lett.32(9), 1296–1298 (2011), doi:10.1109/ LED.2011.2160143. 25

  71. [71]

    B.Brar,G.D.Wilk,A.C.Seabaugh,Directextractionoftheelectrontunnelingeffectivemass in ultrathin SiO2.Appl. Phys. Lett.69(18), 2728–2730 (1996), doi:10.1063/1.117692

  72. [72]

    Esseni, M

    D. Esseni, M. Pala, P. Palestri, C. Alper, T. Rollo, A review of selected topics in physics based modeling for tunnel field-effect transistors.Semicond. Sci. Tech.32(8), 083005 (2017), doi:10.1088/1361-6641/aa6fca. Acknowledgments Funding:We acknowledge support by the Austrian Science Fund (FWF) and the European ResearchCouncil(ERC)underGrantagreementno.1...