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A flexible 300 mm integrated Si MOS platform for electron- and hole-spin qubits exploration

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arxiv 2102.03929 v1 pith:2K7CCVJE submitted 2021-02-07 cond-mat.mes-hall physics.app-phquant-ph

classification cond-mat.mes-hallphysics.app-phquant-ph
keywords qubitsflexiblep-typequantumspinallowingbeamcharacterized
verification ladder T0 review T1 audit T2 compute T3 formal
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We report on a flexible 300 mm process that optimally combines optical and electron beam lithography to fabricate silicon spin qubits. It enables on-the-fly layout design modifications while allowing devices with either n- or p-type ohmic implants, a pitch smaller than 100 nm, and uniform critical dimensions down to 30 nm with a standard deviation ~ 1.6 nm. Various n- and p-type qubits are characterized in a dilution refrigerator at temperatures ~ 10 mK. Electrical measurements demonstrate well-defined quantum dots, tunable tunnel couplings, and coherent spin control, which are essential requirements for the implementation of a large-scale quantum processor.

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Cited by 1 Pith paper

Reviewed papers in the Pith corpus that reference this work. Sorted by Pith novelty score.

  1. Eight-Qubit Operation of a 300 mm SiMOS Foundry-Fabricated Device

    quant-ph 2025-12 conditional novelty 6.0 of 10

    Eight silicon spin qubits in a 300-mm CMOS foundry device were tuned and characterized, with Ramsey dephasing up to 41 μs and Hahn-echo coherence up to 1.31 ms.

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