18-qubit entanglement with photon's three degrees of freedom

A central theme in quantum information science is to coherently control an increasing number of quantum particles as well as their internal and external degrees of freedom (DoFs), meanwhile maintaining a high level of coherence. The ability to create and verify multiparticle entanglement with individual control and measurement of each qubit serves as an important benchmark for quantum technologies. To this end, genuine multipartite entanglement have been reported up to 14 trapped ions, 10 photons, and 10 superconducting qubits. Here, we experimentally demonstrate an 18-qubit Greenberger-Horne-Zeilinger (GHZ) entanglement by simultaneous exploiting three different DoFs of six photons, including their paths, polarization, and orbital angular momentum (OAM). We develop high-stability interferometers for reversible quantum logic operations between the photon's different DoFs with precision and efficiencies close to unity, enabling simultaneous readout of 262,144 outcome combinations of the 18-qubit state. A state fidelity of 0.708(16) is measured, confirming the genuine entanglement of all the 18 qubits.