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Fabrication and Characterization of Aluminum Airbridges for Superconducting Microwave Circuits

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arxiv 1310.2325 v1 pith:Q3WAE5FL submitted 2013-10-09 cond-mat.mes-hall cond-mat.supr-con

Zijun Chen , Anthony Megrant , Julian Kelly , Rami Barends , Joerg Bochmann , Yu Chen , Ben Chiaro , Andrew Dunsworth
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Evan Jeffrey Joshua Mutus Peter O'Malley Charles Neill Pedram Roushan Daniel Sank Amit Vainsencher James Wenner Theodore White Andrew Cleland John Martinis
This is my paper · ORCID
classification cond-mat.mes-hallcond-mat.supr-con
keywords airbridgessuperconductinglosscircuitsfabricationmicrowavemodesadditional
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Superconducting microwave circuits based on coplanar waveguides (CPW) are susceptible to parasitic slotline modes which can lead to loss and decoherence. We motivate the use of superconducting airbridges as a reliable method for preventing the propagation of these modes. We describe the fabrication of these airbridges on superconducting resonators, which we use to measure the loss due to placing airbridges over CPW lines. We find that the additional loss at single photon levels is small, and decreases at higher drive powers.

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