Pith. sign in

REVIEW 3 major objections 6 minor 55 references

This paper reports that a release-free phononic crystal cavity—one that stays attached to its substrate rather than being suspended—can couple strongly to a microwave resonator, with an electromechanical coupling rate of about 30 MHz that e

Reviewed by Pith at T0; open to challenge. T0 means a machine referee read the full paper against a public rubric. the ladder, T0–T4 →

T0 review · deepseek-v4-flash

2026-08-03 02:14 UTC pith:M3BLUGNT

load-bearing objection First release-free phononic crystal in the strong electromechanical coupling regime; the central claim is credible, but the paper needs error bars and a more transparent mode-selection policy. the 3 major comments →

arxiv 2607.29666 v1 pith:M3BLUGNT submitted 2026-07-31 quant-ph cond-mat.mes-hallphysics.app-ph

Release-free phononic crystal with strong microwave coupling

classification quant-ph cond-mat.mes-hallphysics.app-ph
keywords release-free phononic crystalelectromechanical crystalstrong couplinglithium niobatehigh-impedance microwave resonatorkinetic inductancecooperativitymicrowave-to-optical transduction
verification ladder T0 review T1 audit T2 compute T3 formal T4 reserved

The pith

A machine-rendered reading of the paper's core claim, the machinery that carries it, and where it could break.

The paper demonstrates that a phononic crystal cavity patterned in thin-film lithium niobate, left fully in contact with its substrate, reaches the strong-coupling regime with a high-impedance superconducting microwave resonator. The measured electromechanical coupling rate is about 30 MHz, exceeding both the mechanical and microwave loss rates, giving a cooperativity of roughly 180 on resonance. If correct, this is the first release-free phononic crystal to achieve strong electromechanical coupling, completing the electromechanical half of a release-free piezo-optomechanical transducer. The authors also report internal mechanical quality factors above 10,000 at millikelvin temperatures on both silicon and sapphire substrates.

Core claim

The paper claims that a defect mode of a release-free phononic crystal in a 150 nm lithium niobate film, coupled to a high-impedance NbTiN microwave resonator through an interdigital transducer, exhibits coherent electromechanical coupling strong enough to split the microwave response into an avoided crossing. From the splitting they extract g_em/(2π) ≈ 30 MHz, with microwave and mechanical quality factors around Q_μ,i ≈ 1200 and Q_m ≈ 1200, corresponding to a cooperativity C ≈ 180. The authors interpret this as the first demonstration of the strong-coupling regime in a release-free phononic crystal, and they attribute the integration-induced microwave loss to parasitic electromechanical mod

What carries the argument

The central object is the release-free electromechanical crystal (EMC): a one-dimensional phononic crystal in thin-film lithium niobate whose mechanical defect mode lies below the substrate acoustic continuum, so confinement comes from total internal reflection rather than a full phononic band gap. The microwave-to-mechanics coupling is mediated by an aluminum interdigital transducer, and the relevant identity is the participation formula g_em ∝ C_IDT/(C_μ + C_IDT), which is boosted by the high kinetic inductance of the NbTiN resonator (impedance ~2.2 kΩ, capacitance 13.4 fF). The paper also derives g_em² ≈ γ_c/(4 Z_0 C_μ,tot), linking the strong-coupling rate to the external feedline coupli

Load-bearing premise

The extraction of g_em, κ, and γ from the S21 transmission assumes the microwave resonator couples to exactly one mechanical mode and that the fitted mechanical linewidth equals the true loss of that mode; a dense background of parasitic electromechanical modes could distort the lineshape, and background subtraction could remove part of the splitting, making the quoted cooperativity an overestimate.

What would settle it

Repeat the avoided-crossing measurement on a device with a sparser mechanical spectrum (e.g., a shorter cavity or fewer electrode periods) and fit the data with a multi-mode input-output model; if the fitted g_em and the extracted κ and γ change by more than the reported precision, the two-mode extraction is unreliable. Alternatively, measure g_em independently from the room-temperature external coupling γ_c using the derived relation g_em² = γ_c/(4 Z_0 C_μ,tot) and compare to the fitted value.

Watch this falsifier. Get emailed when new claim-graph text bears on it.

If this is right

  • Release-free phononic crystals can serve as compact, thermally anchored interfaces between microwave photons and gigahertz phonons without sacrificing coherent coupling.
  • The silicon-optimized geometry transfers to sapphire with comparable coupling and quality factors, freeing substrate choice for low-loss microwave circuitry.
  • Scaling from measured external coupling rates on sapphire (γ_c/(2π) ≈ 198 kHz) projects g_em/(2π) above 100 MHz for this architecture, implying the current device is loss-limited rather than coupling-limited.
  • Since the coupling already exceeds both loss rates, the main improvement path is raising Q_μ and Q_m—by trimming parasitic electrode capacitance and reducing radiation loss from fabrication disorder—rather than increasing g_em.

Where Pith is reading between the lines

These are editorial extensions of the paper, not claims the author makes directly.

  • If the dense parasitic electromechanical modes identified in the paper's frequency-domain simulation also distort the transmission lineshape beyond the two-mode model, the quoted cooperativity of 180 could be an upper bound; a multi-mode fit would settle this.
  • The thermal advantage of the release-free design—full substrate contact removing optically generated heat—is argued but not directly measured here; a comparison of mechanical-mode occupation under optical pumping against a suspended device would test it.
  • The paper's discussion suggests that extending the design below the gigahertz band, where lithium niobate and aluminum losses are lower, could yield critical coupling at room temperature for classical filtering and sensing; that is a testable prediction, not yet demonstrated.

Editorial analysis

A structured set of objections, weighed in public.

Desk editor's note, referee report, simulated authors' rebuttal, and a circularity audit.

Referee Report

3 major / 6 minor

Summary. The paper reports a release-free electromechanical crystal (EMC) in thin-film lithium niobate integrated with a high-impedance NbTiN microwave resonator. At 10 mK, microwave transmission as a function of magnetic-field tuning shows an avoided crossing between the microwave mode and a mechanical mode; the authors extract g_em/(2π) ≈ 30 MHz, Q_μ,i = 1200, Q_m = 1200, and on this basis quote κ/(2π) ≈ 4.8 MHz, γ/(2π) ≈ 4.3 MHz, and a cooperativity C ≈ 180, placing the device in the strong-coupling regime. The paper also characterizes bare EMCs on silicon and sapphire, reporting internal mechanical quality factors reaching 10^4 at millikelvin temperatures. The claim is that this is the first release-free phononic-crystal device to achieve strong electromechanical coupling, completing the electromechanical piece of a release-free piezo-optomechanical transducer.

Significance. If the central result holds, it is significant: it extends release-free phononic-crystal technology from the optomechanical demonstrations in silicon to a strongly coupled electromechanical system, addressing a well-known thermal-anchoring bottleneck of suspended devices. The central avoided crossing is clearly visible in the two-dimensional transmission map, and the extracted coupling rate is independently corroborated by a circuit-model estimate (33 MHz) based on a reference device and simulated capacitances. The appendices are thorough and the design/fabrication documentation is detailed. However, the manuscript's central quantitative claims—g_em exceeding both loss rates and C≈180—are supported without uncertainty quantification and without a quantitative treatment of the demonstrated parasitic-mode background. These issues are fixable but need to be addressed before the quantitative claims can be taken at face value.

major comments (3)
  1. [Sec. VI, Table I, Fig. 5] The central parameters g_em/(2π)=30 MHz, Q_μ,i=1200, Q_m=1200, and C=180 are quoted without any uncertainties or confidence intervals, even though the fits are performed with an MCMC optimizer (App. F). Since the normal-mode linewidth constrains only κ+γ, the individual values of κ and γ—and hence C=4g_em²/(κγ)—depend on the details of the two-mode fit. Please report posterior distributions or standard errors for all fitted parameters, and state whether the fit is done with a global model over all bias currents or independently per trace. This is needed to assess whether the quoted cooperativity is robust.
  2. [App. E and Sec. VI] The two-mode input-output model used to extract g_em, κ, and γ assumes a single microwave mode coupled to a single mechanical mode, but App. E demonstrates that a dense background of parasitic EMC modes loads the microwave resonator, reducing Q_μ even away from high-Q mechanical resonances. If these parasitic modes also contribute near the main avoided crossing, the Lorentzian terms in the fit can absorb their influence, biasing g_em and the effective linewidths. In addition, the 'background' subtraction performed before fitting could remove part of the real splitting if the background is not perfectly smooth. Please show raw transmission cuts through the avoided crossing, compare fits with alternative background-subtraction models, or extend the model to include the dominant parasitic modes. This is load-bearing for the exact value of C and for the claimed margin of strong coupling.
  3. [App. F] The independent circuit-model estimate g_em/(2π)=33 MHz uses γ_c/(2π)=18 kHz measured on reference EMC devices at room temperature. However, Sec. V shows that γ_c changes substantially between room temperature and cryogenic operation (e.g., 54→117 kHz for LNOS devices in Fig. 4). The authors should justify that the room-temperature reference γ_c is representative of the integrated device at 10 mK, or use a cryogenic reference measurement. The closeness of 33 MHz to 30 MHz is encouraging, but as presented the corroboration relies on a quantity known to be setup-dependent.
minor comments (6)
  1. [Abstract / Sec. V / Table II] The abstract says internal quality factors 'above 10^4' at millikelvin temperature, while Sec. V reports Q_i=10^4 at high phonon occupation and App. G/Table II lists high-power Q_i=10^4 and low-power values of 7.0–8.5×10^3. Please either use '≈10^4' or specify that this is the high-occupation value.
  2. [Sec. VI / Table I] The text quotes Q_μ,i=1200 and Q_μ=1100, while Table I lists only Q_μ,i. Please define the relation between Q_μ, Q_μ,i, Q_μ,c, and the total microwave linewidth κ, so that κ/(2π)=4.8 MHz is traceable.
  3. [Sec. IV] The phrase 'From the sweep shown in Fig. 3d,h' appears to refer to panels (d) and (e) of Fig. 3; please correct the cross-reference.
  4. [Sec. V and Fig. 4] There are formatting errors such as 'Q_i = 104' where superscripts have been lost; please ensure the final typeset version renders 10^4 correctly.
  5. [App. F] The sentence 'We fit our background-corrected data to Eq. (F)' references an unnumbered equation. Please number the S21 expression and the tuning model so the reader can identify exactly which equations are being fit.
  6. [Table I] Minor typographical issue: the table header reads 'V alue' instead of 'Value'.

Circularity Check

0 steps flagged

No significant circularity: g_em is measured from the avoided crossing and cross-checked by an independent circuit-model estimate.

full rationale

The central claim—g_em/(2π) ≈ 30 MHz exceeding both κ/(2π) ≈ 4.8 MHz and γ/(2π) ≈ 4.3 MHz—is derived directly from the measured avoided crossing in S21 (Sec. VI, App. F). The splitting directly sets 2g_em, so the fitted coupling rate is a measurement, not a quantity assumed by the model. The independent circuit-model estimate in App. F uses a separately measured room-temperature external coupling rate γ_c/(2π) = 18 kHz and simulated capacitances to obtain g_em/(2π) = 33 MHz, close to the fitted 30 MHz; this is a genuine cross-check rather than a re-use of the fitted value. The release-free confinement premise leans on the authors' prior work [16,17,19], but it is also supported by physical arguments (operation below the substrate sound cone, total internal reflection) and by the paper's own measured high-Q data, so the self-citations are contextual rather than load-bearing. The parasitic EMC-mode background (App. E) and the absence of error bars are legitimate accuracy caveats, but they are not circularity: even a mispartitioning of κ and γ would not change the directly measured splitting, and the sum κ+γ is constrained by the normal-mode linewidths. No step in the derivation reduces, by the paper's own equations or by self-citation, to its inputs.

Axiom & Free-Parameter Ledger

5 free parameters · 4 axioms · 0 invented entities

No new physical entities are postulated. The central claim rests on standard coupled-mode theory, a domain assumption about release-free confinement, and several fitted parameters (g_em, Q values, tuning coefficients, imaginary density, kinetic inductance). The paper is honest about most of these, but the main figures of merit are fit outputs without quoted uncertainties.

free parameters (5)
  • g_em/(2π) = 30 MHz
    Central electromechanical coupling, extracted from MCMC fit to the S21 avoided crossing; corroborated by circuit-model estimate of 33 MHz using a reference device.
  • Microwave and mechanical loss rates (Q_µ,i, Q_µ,c, Q_m) = Q_µ,i = 1.2×10^3, Q_µ,c = 1.4×10^4, Q_m = 1.2×10^3
    Loss rates used to compute cooperativity C = 180; fitted from the same transmission data and quoted without uncertainties.
  • Magnetic tuning parameters k and I_0 = not quoted
    Current-dependent resonator frequency model Δf/f = -k(I - I_0)^2 used to track the avoided crossing; fitted in the MCMC procedure.
  • Imaginary component of lithium niobate density = not quoted
    Ad hoc addition in the COMSOL EMC admittance model to mimic cryogenic material loss and reproduce the parasitic microwave loss channel (App. E).
  • Sheet kinetic inductance L_k and geometry factor σ_g = L_k = 64.0 nH, σ_g = 1.9 sq
    Extracted from SONNET simulations matching the measured resonator frequency; used in the circuit model predicting g_em.
axioms (4)
  • standard math Standard input-output theory for two coupled harmonic modes (Eq. F) governs the microwave transmission S21.
    Used to derive the transmission formula with an avoided crossing; standard cavity optomechanics/electromechanics.
  • domain assumption Release-free confinement works because the mechanical mode lies below the substrate sound cone and is confined by total internal reflection.
    Design premise from Sec. II; supported by prior work [16,17,19] and by measured Qi ≈ 10^4, but not directly proven for every measured device.
  • ad hoc to paper The EMC admittance computed in COMSOL with an added imaginary density captures the parasitic microwave loss channel.
    App. E uses this model to explain the integrated resonator Q degradation; the loss parameter is not independently measured.
  • domain assumption The fitted two-mode model neglects all other EMC mechanical modes.
    The fit uses a single mechanical mode interacting with the microwave mode, while App. E/E notes a dense spectrum of parasitic EMC modes that load the resonator but are not included in the fitted Hamiltonian.

pith-pipeline@v1.3.0-daily-deepseek · 21588 in / 12195 out tokens · 117428 ms · 2026-08-03T02:14:25.477112+00:00 · methodology

0 comments
read the original abstract

Phonons hold promise for storing and transferring quantum information, including in mechanically-mediated quantum interconnects between superconducting qubits and light. Phononic crystal cavities confine gigahertz sound to micron-scale volumes well matched to near-infrared light. So far, these devices have typically been suspended to suppress phononic radiation loss into the substrate, but suspension limits thermal anchoring leading to excess noise. Release-free phononic crystals have emerged as a way to address this challenge -- but had yet to be shown compatible with strong electromechanical interactions. Here, we demonstrate a release-free phononic crystal cavity strongly coupled to a high-impedance microwave resonator, with an electromechanical coupling rate $g_\mathrm{em}/(2\pi) \approx 30\,\text{MHz}$ that exceeds both the mechanical and microwave loss rates, leading to a cooperativity up to $\mathcal{C} \approx 180$ on resonance. In addition, our lithium niobate phononic crystals reach quality factors above $10^4$ at millikelvin temperature on both silicon and sapphire substrates. Our results establish release-free phononic crystals as compact, scalable interfaces between microwaves and gigahertz sound for emerging sensing, communication, and computing systems.

Figures

Figures reproduced from arXiv: 2607.29666 by Joey Frey, Johan Kolvik, Paul Burger, Rapha\"el Van Laer, Trond Hjerpekj{\o}n Haug.

Figure 1
Figure 1. Figure 1: Release-free phononic crystal cavity with microwave readout. a, Schematic of the device design, showing the lithium niobate electromechanical crystal (green) and aluminum IDT (gray) going across with a defect cell in the center transitioning into mirror cells on the edges. Left inset: cross-sectional view of the device with materials indicated. Right inset: Unit cell geometry with the main design parameter… view at source ↗
Figure 2
Figure 2. Figure 2: Fabricated release-free EMCs connected to microwave feedline (top) and high-kinetic-inductance microwave resonator (bottom). Material color coding in schematics and false-color images denotes lithium niobate (green), NbTiN (red), and aluminum (dark gray). a, Independent EMC device configured for microwave reflection measurements. b, Micrograph of the EMC device with IDT connected to two probe pads (scale b… view at source ↗
Figure 3
Figure 3. Figure 3: Room-temperature microwave measurement of release-free phononic crystal cavities on silicon and sapphire substrates. a, Reflection measurement schematic showing the EMC coupled to a microwave feedline with impedance Z0 through external coupling rate γc and with internal loss rate γi. b,(c,) Microwave reflection spectrum S11 of LNOS and LiSa EMCs measured at room temperature. Inset shows fit for indicated r… view at source ↗
Figure 4
Figure 4. Figure 4: Millikelvin microwave measurement of release-free phononic crystal cavities on silicon and sapphire substrates. a, Cryogenic reflection measurement schematic showing the EMC connected to a circulator at the mixing chamber plate, with the external (internal) loss rate γc (γi) indicated. b,(c,) Microwave reflection (S11) measured for an LNOS (LiSa) EMC at cryogenic temperatures. Inset shows fit for center pe… view at source ↗
Figure 5
Figure 5. Figure 5: Release-free electromechanical crystal in the strong-coupling regime with a high-impedance mi￾crowave resonator. Microwave transmission |S21| measured at 10 mK as the resonator is tuned through the mechanical mode with the applied coil current. Dotted lines mark the simulated bare microwave (red) and mechanical (green) res￾onance frequencies; where they intersect, the transmission splits into an avoided cr… view at source ↗
Figure 6
Figure 6. Figure 6: Fabrication process flow for EMCs on either a silicon or a sapphire substrate. i, Blanket ion milling of 300 nm lithium niobate to a thickness of 150 nm on an oxide substrate. ii, Patterning of the coupon and EMC structures by argon milling. iii, Suspension of the coupon by wet etching. iv, Pick-up of the coupon using a PDMS stamp. v, Transfer of the coupon onto the target chip. vi, Cleaning and annealing … view at source ↗
Figure 7
Figure 7. Figure 7: Fabrication process flow for EMCs integrated with a high-impedance microwave resonator. i, Blanket ion milling of 300 nm lithium niobate to a thickness of 150 nm on an oxide substrate. ii, Patterning of the coupon and EMC structures by argon milling. iii, Suspension of the coupon by wet etching. iv, Pick-up of the coupon using a PDMS stamp. v, Transfer of the coupon onto the target chip. vi, Cleaning and a… view at source ↗
Figure 8
Figure 8. Figure 8: Local displacement and rotation of devices during micro-transfer printing. a, Schematic illustrating local offset of each lithium niobate coupon after micro-transfer printing, with local detection of one coupon illustrated. b, Scatter plot with each coupon location shown and their ab￾solute offset shown in color. Missing or faulty detections are set to have max amplitude. c, Histogram plot showing abso￾lut… view at source ↗
Figure 10
Figure 10. Figure 10: Equivalent circuit model for coupled mode system measured in transmission. a, Integrated EMC mode schematic indicating microwave mode (ˆa), mechanical mode (ˆb), their internal loss rates (κi) and (γi) respectively. The microwave mode is coupled to a feedline with coupling rate κc and the the two modes interact with coupling rate gem. b, Circuit representation of the device, indicating mi￾crowave resonato… view at source ↗
Figure 11
Figure 11. Figure 11: Frequency-domain simulation of NbTiN-EMC system a, Schematic illustrating how the EMC admittance is connected to simulate the full system response. Inset showing an avoided crossing with the main EMC mode at 5.2 GHz. b, Simulated one-port microwave reflection response |S11| of a silicon-clamped EMC. c, Color map showing the simulated microwave transmission response |S21| for different sheet kinetic induct… view at source ↗
Figure 12
Figure 12. Figure 12: Comparison of the measured and simulated microwave transmission magnitude |S21| as a func￾tion of bias current. a, Measure response, same dataset as shown in [PITH_FULL_IMAGE:figures/full_fig_p014_12.png] view at source ↗
Figure 13
Figure 13. Figure 13: Telegraphing behavior of main mechani￾cal mode in LNOS EMCs at low phonon occupation nph < 1. a Microwave reflection measurement swept over the mechanical resonance found at high power (∆ = ω − ωm). Low drive powers are used to reach nph < 1 . b, Time trace of the microwave reflection signal at zero detuning (∆ = 0), showing telegraphic switching. surface-to-volume ratio [27]. Both platforms provide use￾f… view at source ↗
Figure 14
Figure 14. Figure 14: Temperature dependent performance of LiSa EMC. a, Mechanical resonance frequency of a LiSa EMC as a function of temperature, showing a gradual in￾crease upon cooling. b, Internal quality factor extracted from fits to the microwave reflection spectra. c, External coupling rate extracted from the same measurements. temperature setup. In the absence of a sharp transition (e.g. due to onset of superconductivi… view at source ↗
Figure 15
Figure 15. Figure 15: Experimental setup for measurement at cryogenic temperatures.The sample is mounted on a mi￾crowave PCB inside a dilution refrigerator, with an external magnetic coil and magnetic shielding. For reflection measure￾ments of individual EMC devices, a circulator is used (A).For high-impedance microwave resonators, transmission measure￾ments are performed directly through the PCB (B). trical connections and ho… view at source ↗
Figure 16
Figure 16. Figure 16: Effects of length scaling of the EMC a, Internal quality factor Qi and external coupling rate γc of an optimized EMC versus number of electrode periods. b, Micro-graph of an EMC broken during the micro-transfer printing fabrication step (scale bar 5 µm). c, Fourier spectra of the displacement field of three EMC geometries demonstrating the effect of cavity length and electrode coverage. Shown for normaliz… view at source ↗

discussion (0)

Sign in with ORCID, Apple, or X to comment. Anyone can read and Pith papers without signing in.

Reference graph

Works this paper leans on

55 extracted references

  1. [1]

    J. Chan, T. P. M. Alegre, A. H. Safavi-Naeini, J. T. Hill, A. Krause, S. Gr¨ oblacher, M. Aspelmeyer, and O. Painter, Laser cooling of a nanomechanical oscillator into its quantum ground state, Nature478, 89 (2011)

  2. [2]

    A. D. O’Connell, M. Hofheinz, M. Ansmann, R. C. Bial- czak, M. Lenander, E. Lucero, M. Neeley, D. Sank, H. Wang, M. Weides, J. Wenner, J. M. Martinis, and A. N. Cleland, Quantum ground state and single-phonon control of a mechanical resonator, Nature464, 697 (2010)

  3. [3]

    J. D. Teufel, D. Li, M. S. Allman, K. Cicak, A. J. Sirois, J. D. Whittaker, and R. W. Simmonds, Circuit cavity electromechanics in the strong-coupling regime, Nature 471, 204 (2011)

  4. [4]

    Resonances are only measurable below a temperature threshold at which internal losses are sufficiently reduced (App. H). In this regime,γ c exhibits only a weak temper- ature dependence, suggesting that the observed change in coupling rate does not arise from a sharp transition (e.g. the onset of superconductivity). Instead, we attribute the increased cou...

  5. [5]

    Meesala, Y.-I

    S. Meesala, Y.-I. Sohn, H. A. Atikian, S. Kim, M. J. Bu- rek, J. T. Choy, and M. Lonˇ car, Enhanced Strain Cou- pling of Nitrogen-Vacancy Spins to Nanoscale Diamond Cantilevers, Physical Review Applied5, 034010 (2016)

  6. [6]

    Hwang, J

    Y. Hwang, J. Puebla, K. Kondou, C. Gonzalez- Ballestero, H. Isshiki, C. S. Mu˜ noz, L. Liao, F. Chen, W. Luo, S. Maekawa, and Y. Otani, Strongly Coupled Spin Waves and Surface Acoustic Waves at Room Tem- perature, Physical Review Letters132, 056704 (2024)

  7. [7]

    Mirhosseini, A

    M. Mirhosseini, A. Sipahigil, M. Kalaee, and O. Painter, Superconducting qubit to optical photon transduction, Nature588, 599 (2020)

  8. [8]

    Eichenfield, J

    M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, Optomechanical crystals, Nature462, 78 (2009)

  9. [9]

    A. H. Safavi-Naeini, D. Van Thourhout, R. Baets, and R. Van Laer, Controlling phonons and photons at the wavelength scale: integrated photonics meets integrated phononics, Optica6, 213 (2019)

  10. [10]

    J. Chan, A. H. Safavi-Naeini, J. T. Hill, S. Meenehan, and O. Painter, Optimized optomechanical crystal cav- ity with acoustic radiation shield, Applied Physics Let- ters101, 081115 (2012), publisher: American Institute of Physics

  11. [11]

    A. H. Safavi-Naeini and O. Painter, Design of op- tomechanical cavities and waveguides on a simultaneous bandgap phononic-photonic crystal slab, Optics Express 18, 14926 (2010)

  12. [12]

    G. S. MacCabe, H. Ren, J. Luo, J. D. Cohen, H. Zhou, A. Sipahigil, M. Mirhosseini, and O. Painter, Nano- acoustic resonator with ultralong phonon lifetime, Sci- ence370, 840 (2020)

  13. [13]

    Jiang, F

    W. Jiang, F. M. Mayor, S. Malik, R. Van Laer, T. P. McKenna, R. N. Patel, J. D. Witmer, and A. H. Safavi- Naeini, Optically heralded microwave photon addition, Nature Physics , 1 (2023)

  14. [14]

    Meesala, S

    S. Meesala, S. Wood, D. Lake, P. Chiappina, C. Zhong, A. D. Beyer, M. D. Shaw, L. Jiang, and O. Painter, Non- classical microwave–optical photon pair generation with a chip-scale transducer, Nature Physics20, 871 (2024)

  15. [15]

    S. M. Meenehan, J. D. Cohen, G. S. MacCabe, F. Mar- sili, M. D. Shaw, and O. Painter, Pulsed Excitation Dy- namics of an Optomechanical Crystal Resonator near Its Quantum Ground State of Motion, Physical Review X5, 041002 (2015)

  16. [16]

    Sonar, U

    S. Sonar, U. Hatipoglu, S. Meesala, D. P. Lake, H. Ren, and O. Painter, High-efficiency low-noise optomechanical crystal photon-phonon transducers, Optica12, 99 (2025)

  17. [17]

    Kolvik, P

    J. Kolvik, P. Burger, J. Frey, and R. V. Laer, Clamped and sideband-resolved silicon optomechanical crystals, Optica10, 913 (2023)

  18. [18]

    Burger, J

    P. Burger, J. Frey, J. Kolvik, D. Hambraeus, and R. Van Laer, Design of a release-free piezo- optomechanical quantum transducer, APL Photonics10, 010801 (2025)

  19. [19]

    Kolvik, P

    J. Kolvik, P. Burger, D. Hambraeus, T. H. Haug, J. Frey, M. B. Kristensen, and R. Van Laer, Optomechanical crys- tal in light-resilient quantum ground state (2025)

  20. [20]

    Burger, J

    P. Burger, J. Frey, J. Kolvik, M. B. Kristensen, and R. V. Laer, Release-free electro-optomechanical crystal modu- lator, Optics Letters51, 3886 (2026)

  21. [21]

    W. Fu, Z. Shen, Y. Xu, C.-L. Zou, R. Cheng, X. Han, and H. X. Tang, Phononic integrated circuitry and spin–orbit interaction of phonons, Nature Communications10, 2743 (2019)

  22. [22]

    F. M. Mayor, W. Jiang, C. J. Sarabalis, T. P. McKenna, 8 J. D. Witmer, and A. H. Safavi-Naeini, Gigahertz Phononic Integrated Circuits on Thin-Film Lithium Nio- bate on Sapphire, Physical Review Applied15, 014039 (2021)

  23. [23]

    C. J. Sarabalis, Y. D. Dahmani, R. N. Patel, J. T. Hill, and A. H. Safavi-Naeini, Release-free silicon-on-insulator cavity optomechanics, Optica4, 1147 (2017)

  24. [24]

    C. J. Sarabalis, J. T. Hill, and A. H. Safavi-Naeini, Guided acoustic and optical waves in silicon-on-insulator for Brillouin scattering and optomechanics, APL Photon- ics1, 071301 (2016)

  25. [25]

    M. Xu, X. Han, W. Fu, C.-L. Zou, and H. X. Tang, Frequency-tunable high-Qsuperconducting resonators via wireless control of nonlinear kinetic inductance, Ap- plied Physics Letters114, 192601 (2019)

  26. [26]

    R. P. S. M. Lobo, J. D. LaVeigne, D. H. Reitze, D. B. Tanner, Z. H. Barber, E. Jacques, P. Bosland, M. J. Burns, and G. L. Carr, Photoinduced time-resolved elec- trodynamics of superconducting metals and alloys, Phys- ical Review B72, 024510 (2005)

  27. [27]

    P. J. d. Visser,Quasiparticle dynamics in aluminium su- perconducting microwave resonators, Ph.D. thesis, Delft University of Technology, Delft (2014)

  28. [28]

    E. A. Wollack, A. Y. Cleland, P. Arrangoiz-Arriola, T. P. McKenna, R. G. Gruenke, R. N. Patel, W. Jiang, C. J. Sarabalis, and A. H. Safavi-Naeini, Loss channels affect- ing lithium niobate phononic crystal resonators at cryo- genic temperature, Applied Physics Letters118, 123501 (2021)

  29. [29]

    C. J. Sarabalis, Y. D. Dahmani, A. Y. Cleland, and A. H. Safavi-Naeini, S-band delay lines in suspended lithium niobate, Journal of Applied Physics127, 054501 (2020)

  30. [30]

    Jiang, C

    W. Jiang, C. J. Sarabalis, Y. D. Dahmani, R. N. Patel, F. M. Mayor, T. P. McKenna, R. Van Laer, and A. H. Safavi-Naeini, Efficient bidirectional piezo- optomechanical transduction between microwave and op- tical frequency, Nature Communications11, 1166 (2020)

  31. [31]

    L. Shao, S. Maity, L. Zheng, L. Wu, A. Shams-Ansari, Y.-I. Sohn, E. Puma, M. Gadalla, M. Zhang, C. Wang, E. Hu, K. Lai, and M. Lonˇ car, Phononic Band Structure Engineering for High-Q Gigahertz Surface Acoustic Wave Resonators on Lithium Niobate, Physical Review Applied 12, 014022 (2019)

  32. [32]

    Maksymowych, M

    M. Maksymowych, M. Yuksel, O. Hitchcock, N. Lee, F. Mayor, W. Jiang, M. Roukes, and A. Safavi-Naeini, Spectral diffusion of nanomechanical resonators due to single quantum defects, Physical Review Applied24, 044066 (2025)

  33. [33]

    Yamagata, N

    M. Yamagata, N. Cao, D. D. John, and H. Hashemi, Surface-Acoustic-Wave Waveguides for Radio Frequency Signal Processing, IEEE Transactions on Microwave The- ory and Techniques71, 931 (2023)

  34. [34]

    Y. Yao, D. Hao, and Q. Zhang, Perspectives on Devices for Integrated Phononic Circuits, Advanced Materials 37, 2407642 (2025)

  35. [35]

    Zhang, C

    L. Zhang, C. Cui, Y. Xue, P. Chen, and L. Fan, Scal- able photonic-phonoinc integrated circuitry for recon- figurable signal processing, Nature Communications16, 2718 (2025)

  36. [36]

    Schaffer, A

    Z. Schaffer, A. Hassanien, M. A. Masud, and G. Piazza, Measurement of Intrinsic Mechanical Loss in Aluminum Films from 3 to 25 GHz by HBAR Spectroscopy, in2023 IEEE International Ultrasonics Symposium (IUS)(2023) pp. 1–4

  37. [37]

    Probst, F

    S. Probst, F. B. Song, P. A. Bushev, A. V. Ustinov, and M. Weides, Efficient and robust analysis of complex scat- tering data under noise in microwave resonators, Review of Scientific Instruments86, 024706 (2015)

  38. [38]

    Scigliuzzo, L

    M. Scigliuzzo, L. E. Bruhat, A. Bengtsson, J. J. Burnett, A. F. Roudsari, and P. Delsing, Phononic loss in super- conducting resonators on piezoelectric substrates, New Journal of Physics22, 053027 (2020)

  39. [39]

    S. J. Bosman, M. F. Gely, V. Singh, D. Bothner, A. Castellanos-Gomez, and G. A. Steele, Approaching ultra-strong coupling in Transmon circuit-QED using a high-impedance resonator, Physical Review B95, 224515 (2017)

  40. [40]

    Jiang, R

    W. Jiang, R. N. Patel, F. M. Mayor, T. P. McKenna, P. Arrangoiz-Arriola, C. J. Sarabalis, J. D. Witmer, R. Van Laer, and A. H. Safavi-Naeini, Lithium niobate piezo-optomechanical crystals, Optica6, 845 (2019)

  41. [41]

    Chiappina, J

    P. Chiappina, J. Banker, S. Meesala, D. Lake, S. Wood, and O. Painter, Design of an ultra-low mode volume piezo-optomechanical quantum transducer, Optics Ex- press31, 22914 (2023)

  42. [42]

    Arrangoiz-Arriola, E

    P. Arrangoiz-Arriola, E. A. Wollack, Z. Wang, M. Pechal, W. Jiang, T. P. McKenna, J. D. Witmer, R. Van Laer, and A. H. Safavi-Naeini, Resolving the energy levels of a nanomechanical oscillator, Nature571, 537 (2019)

  43. [43]

    M. Ryzy, T. Grabec, J. A. ¨Osterreicher, M. Hettich, and I. A. Veres, Measurement of coherent surface acoustic wave attenuation in polycrystalline aluminum, AIP Ad- vances8, 125019 (2018)

  44. [44]

    Gr¨ unsteidl, I

    C. Gr¨ unsteidl, I. Veres, T. Berer, S. Kreuzer, R. Rothe- mund, M. Hettich, E. Scherleitner, and M. Ryzy, Mea- surement of the attenuation of elastic waves at GHz frequencies using resonant thickness modes, Applied Physics Letters117, 164102 (2020)

  45. [45]

    Luschmann, A

    T. Luschmann, A. Jung, S. Gepr¨ ags, F. X. Haslbeck, A. Marx, S. Filipp, S. Gr¨ oblacher, R. Gross, and H. Huebl, Surface acoustic wave resonators on thin film piezoelectric substrates in the quantum regime, Materials for Quantum Technology3, 021001 (2023)

  46. [46]

    R. G. Gruenke, O. A. Hitchcock, E. A. Wollack, C. J. Sarabalis, M. Jankowski, T. P. McKenna, N. R. Lee, and A. H. Safavi-Naeini, Surface modification and coherence in lithium niobate SA W resonators, Scientific Reports14, 6663 (2024), publisher: Nature Publishing Group

  47. [47]

    W. Wang, L. Xiao, B. Zhang, Y. Zeng, Z. Hua, C. Ma, H. Huang, Y. Xu, J.-Q. Wang, G. Xue, H. Yu, X.-B. Xu, C.-L. Zou, and L. Sun, Circuit Quantum Acousto- dynamics in a Scalable Phononic Integrated Circuit Ar- chitecture (2025)

  48. [48]

    High power

    E. A. Wollack, A. Y. Cleland, R. G. Gruenke, Z. Wang, P. Arrangoiz-Arriola, and A. H. Safavi-Naeini, Quantum state preparation and tomography of entangled mechan- ical resonators, Nature604, 463 (2022). Appendix A: EMC F abrication The following steps describe the fabrication process for the LNOS EMC, and the devices presented in Sections IV and V (Fig. 6...

  49. [49]

    SA W 4.8 134 kHz - 8.5×10 4 6.4×10 4 2023

  50. [50]

    SA W 1.0 - - 6.1×10 4 - 2019

  51. [51]

    NS-PCR 3.9 - 0.36 MHz 2.1×10 4 1.2×10 4 2025

  52. [52]

    NS-PCR 3.4 50 MHz - 4.7×10 4 - 2021

  53. [53]

    S-PC 2.0 - 10.5 MHz - 1.6×10 4 2022 [27]** S-PC 2.0 85 kHz - 10 5 7.0×10 3 2021

  54. [54]

    S-PC 2.0 8.8 mHz - 1.7×10 4 - 2019

  55. [55]

    ∗∗ For aluminum on-defect devices, with estimated low powerQi

    S-PC 2.4 - 15.7 MHz - 6.5×10 3 2019 LNOS EMC (This work) NS-PC 4.7 72.6 kHz 30 MHz 10 4 7.0×10 3 2026 LiSa EMC (This work) NS-PC 5.2 198 kHz - 10 4 8.5×10 3 2026 ∗ Measured on two separate devices. ∗∗ For aluminum on-defect devices, with estimated low powerQi. Appendix H: EMC T emperature Dependence To determine the temperature-dependent behavior of our d...