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Simple coplanar waveguide resonator mask targeting metal-substrate interface
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Simple coplanar waveguide resonator mask targeting metal-substrate interface
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This white paper presents a single-layer mask, found at https://github.com/Boulder-Cryogenic-Quantum-Testbed/simple-resonator-mask. It is designed for fabrication of superconducting microwave resonators towards 1:1 comparisons of dielectric losses from the metal-substrate interface. Finite-element electromagnetic simulations are used to determine participation ratios of the four major regions of the on-chip devices, as well as to confirm lack of crosstalk between neighboring devices and demonstrate coupling tunability over three orders of magnitude. This mask is intended as an open-source community resource for facilitating precise and accurate comparisons of materials in the single-photon, millikelvin regime.
Forward citations
Cited by 3 Pith papers
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Resist-free shadow deposition using silicon trenches for Josephson junctions in superconducting qubits
A resist-free silicon-trench shadow deposition method fabricates Al-AlOx-Al Josephson junctions and qubits with median relaxation times up to 184 microseconds and minimal substrate-metal contamination.
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Resist-free shadow deposition using silicon trenches for Josephson junctions in superconducting qubits
Resist-free shadow deposition via etched silicon trenches produces Al-AlOx-Al Josephson junctions with median qubit energy relaxation times of 184 microseconds and minimal substrate-metal interface contamination.
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Fabrication effects on Niobium oxidation and surface contamination in Niobium-metal bilayers using X-ray photoelectron spectroscopy
XPS evaluation of 17 capping layers identifies resilient options that limit niobium oxidation during standard fabrication and improve microwave resonator performance.
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