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A nanogapped hysteresis-free field-effect transistor

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arxiv 2306.15690 v1 pith:IWF3OAPI submitted 2023-06-24 cond-mat.mes-hall cond-mat.mtrl-sci

A nanogapped hysteresis-free field-effect transistor

classification cond-mat.mes-hall cond-mat.mtrl-sci
keywords structurechanneldevicefield-effecthysteresis-freenanogappedsemi-suspendedultraclean
verification ladder T0 review T1 audit T2 compute T3 formal T4 reserved
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We propose a semi-suspended device structure and construct nanogapped, hysteresis-free field-effect transistors (FETs), based on the van der Waals stacking technique. The structure, which features a semi-suspended channel above a submicron-long wedge-like nanogap, is fulfilled by transferring ultraclean BN-supported MoS$_2$ channels directly onto dielectric-spaced vertical source/drain stacks. Electronic characterization and analyses reveal a high overall device quality, including ultraclean channel interfaces, negligible electrical scanning hysteresis, and Ohmic contacts in the structures. The unique hollow FET structure holds the potential for exploiting reliable electronics, as well as nanofluid and pressure sensors.

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