Hyperinductance based on stacked Josephson junctions

Superinductances are superconducting circuit elements that combine a large inductance with a low parasitic capacitance to ground, resulting in a characteristic impedance exceeding the resistance quantum $R_Q = h/(2e)^2 \simeq 6.45 \mathrm{k}\Omega$. In recent years, these components have become key enablers for emerging quantum circuit architectures. However, achieving high characteristic impedance while maintaining scalability and fabrication robustness remains a major challenge. In this work, we present two fabrication techniques for realizing superinductances based on vertically stacked Josephson junctions. Using a multi-angle Manhattan (MAM) process and a zero-angle (ZA) evaporation technique -- in which junction stacks are connected pairwise using airbridges -- we fabricate one-dimensional chains of stacks that act as high-impedance superconducting transmission lines. Two-tone microwave spectroscopy reveals the expected $\sqrt{n}$ scaling of the impedance with the number of junctions per stack. The chain fabricated using the ZA process, with nine junctions per stack, achieves a characteristic impedance of $\sim 16 \mathrm{k}\Omega$, a total inductance of $5.9 \mathrm{\mu H}$, and a maximum frequency-dependent impedance of $50 \mathrm{k}\Omega$ at 1.4 GHz. Our results establish junction stacking as a scalable, robust, and flexible platform for next-generation quantum circuits requiring ultra-high impedance environments.